Helios Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credits per student.
This course is an introductory course for new users; this is a 2-week maintenance course. The course covers the following:
- Course introduction
- Equipment safety and evacuation
- System operations overview
- Wiring document overview
- Component location
- Network and Computer overview
- Maintenance overview
- Software functions
- Fault and abort status identification
- Power Rack overview
- Handling recovery
- Preventive and general corrective maintenance procedure hands-on
- Process module overview
- Power and control system overview
- Gas and cooling systems overview
- Lamp exchange
- Quartz R&R
- Temperature system overview
- Robot management, and computer system overview
- In depth gas flow theory
- Recipe creation, management, and optimization
- Introduction to CAST
- Installing Calibration wafers
- Temperature and pyrometer theory and calibration
- Lamp correction, theory and optimization
- Acquisition and transfer of Calibration data
- Chamber Matching
- Engineering software controls and functions
Prerequisite: None
Length: 10-days
Helios Steam – Level 2 In Development
Free with 2-Training Credits per student.
This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.The course covers the following:
- Course introduction
- Equipment safety and evacuation
Prerequisite: Level 1, 2
Length: 5-days
Temp Cal - Level 4
Not a free course.
This course is for the advanced users; it is required to attend level 1 and 2 of the Helios courses.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Analyze Fast I/O and Transfer AD card signals
- Peltier Current control unit overview
- Wafer and Lamp Pyro overview
- Pyro chiller overview
- Install Calibration wafer
- Acquisition and transfer of calibration data
- CAST software overview
- Calibrate Lamp control circuit
- Chamber matching
- Calibration check
Prerequisite: 2900 or 3000 - Level 1, 2
Length: 5-days
Helios Advanced Maintenance - Level 4
Not a free course.
This course is for the advanced users; it is required to attend level 1 and 2 courses and work for six months on the Helios before attending this course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Functional overview of major and minor subsystems
- Fault and abort status identification for Heating Interlock sequence
- Fault and abort status identification for Personal and Machine safety
- Fault and abort status identification for Main Breaker control circuit
- Fault and abort status identification for Main Power circuit
- Maintenance software functions
- Schematic overview
- Trouble identification and isolation techniques
- Hands-on troubleshooting of machine components
Prerequisite: Helios - Level 1, 2
Length: 5-days
RTP-3000 Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credit per student.
This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- System operations
- Component overview
- Schematic and wiring document overview
- Maintenance software functions
- Network and Computer overview
- Exercise and practice UNIX, FTP, Telnet, VI editor
- Fault and abort status identification
- Handling recovery
- Cooling circuit overview
- Preventive and general corrective maintenance
- Process module overview
- Power and control system overview
- Gas and cooling systems overview
- Quartz R&R
- Lamp exchange
- Temperature system overview
- Robot management
- Robot Teaching
- Computer system overview
- In depth gas flow theory
- Computer network communications
- Software structure and GUI overview
- Recipe creation and management
- Make a Calibration wafer
- Recipe optimization
- Temperature and pyrometer theory and calibration
- Lamp correction tables, LCT, CoCoS, FAC
- Opus for Flash Anneal
- P-I-D theory and optimization
- Engineering software controls and functions
Prerequisite: None
Length: 10-days
3000 Steam – Level 2
Free with 1-Training Credit per student.
This course is for the advanced user; it is required to attend the Level 1 and 2 Maintenance Overview course to qualify for this training.The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Steam and Standard Tool comparison
- Steam Components overview
- Wiring Documents overview
- Hardware and structure of Steam Generator
- Steam Controller overview
- Structure of HBU
- Exercise and practice at the Steam Tool
- Generator and Tool interface
- Enable requirements and Software
- Recipe editor, Hydrogen and Oxygen gas flows
- Rotation setup, adjust and use in recipe
- Hardware component monitoring
Prerequisite: Level 1, 2
Length: 5-days
RTP-3000 Advanced Maintenance - Level 4
Not a free course.
This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 3000 before attending this course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Functional overview of major subsystems
- Computer system and structure
- UNIX and VI commands
- Telnet and FTP
- Lamp DC power switching system
- Rotation setup, adjustments
- Enhanced Independent Lamp Controller
- Network communication
- Robot and Pre-aligner communication, power, vacuum sensor, and adjustments
- Cassette systems, SMIF, FOUP, Combi overview
- Fault and abort status identification
- Maintenance software functions
- Schematic overview
- Rotation
- Trouble identification and isolation techniques
- Hands-on troubleshooting of machine components
Prerequisite: 3000 - Level 1, 2
Length: 5-days
Ripple Temp Cal - Level 4, In development
Not a free course.
This course is for the advanced users; it is required to attend level 1 and 2 of the 2900 or 3000 courses.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
Prerequisite: 2900 or 3000 - Level 1, 2
Length: 5-days
RTP-2900 Maintenance Overview - Level 1 and Level 2
Free with 2-Training Credit per student.
This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- System operations
- Component overview
- Maintenance software functions
- Fault and abort status identification
- Handling recovery
- Preventive and general corrective maintenance
- Process module overview
- Power and control system overview
- Gas and cooling systems overview
- Quartz R&R
- Lamp exchange
- Temperature system overview
- Robot management
- Robot Teaching
- Computer system overview
- In depth gas flow theory
- Recipe creation and management
- Recipe optimization
- Temperature and pyrometer theory and calibration
- Lamp correction
- P-I-D theory and optimization
- Engineering software controls and functions
Prerequisite: None
Length: 5-5ays
RTP-2900 Advanced Maintenance - Level 4
Not a free course.
This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 2900 before attending this course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Functional overview of major and minor subsystems
- Fault and abort status identification for Heating Interlock sequence
- Fault and abort status identification for Personal and Machine safety
- Fault and abort status identification for Main Breaker control circuit
- Fault and abort status identification for Main Power circuit
- Maintenance software functions
- Schematic overview
- Trouble identification and isolation techniques
- Hands-on troubleshooting of machine components
Prerequisite: 2900 - Level 1, 2
Length: 5-days
RTP-2800 Maintenance Overview - Level 1 and Level 2
On-site only, call +49-7348-981-103 for scheduling.
This course is an introductory course for new users; this is a 2-week course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- System operations
- Component overview
- Maintenance software functions
- Fault and abort status identification
- Handling recovery
- Preventive and general corrective maintenance
- Process module overview
- Power and control system overview
- Gas and cooling systems overview
- Quartz R&R
- Lamp exchange
- Temperature system overview
- Robot management
- Robot Teaching
- Computer system.
- In depth gas flow theory
- Recipe creation and management
- Recipe optimization
- Temperature and pyrometer theory and calibration
- Lamp correction
- P-I-D theory and optimization
- Engineering software controls and functions
Prerequisite: None
Length: 5-days
RTP-2800 Advanced Maintenance - Level 4
On-site only, call +49-7348-981-103 for scheduling.
This course is for the advanced users; it is required to attend the two previous level courses and work for six months on the 2800 before attending this course.
The course covers the following:
- Course introduction
- Equipment safety and evacuation
- Functional overview of major and minor subsystems
- Fault and abort status identification for Heating Interlock sequence
- Fault and abort status identification for Personal and Machine safety
- Fault and abort status identification for Main Breaker control circuit
- Fault and abort status identification for Main Power circuit
- Maintenance software functions
- Schematic overview
- Trouble identification and isolation techniques
- Hands-on troubleshooting of machine components
Prerequisite: 2800 - Level 1, 2
Length: 5-days
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