Mattson Technology Inc · S-4 · On 9/25/0

Document 1 of 9 · S-4 · Form S-4

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   As filed with the Securities and Exchange Commission on September 25, 2000
                                                        Registration No. 333-
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                               ----------------

                                    FORM S-4
                             REGISTRATION STATEMENT
                                     UNDER
                           THE SECURITIES ACT OF 1933

                               ----------------

                            MATTSON TECHNOLOGY, INC.
             (Exact name of Registrant as specified in its charter)

        Delaware                     3559                    77-0208119
     (State or other           (Primary Standard          (I.R.S. Employer
     jurisdiction of              Industrial             Identification No.)
    incorporation or         Classification Number)
      organization)

                               2800 Bayview Drive
                           Fremont, California 94538
                           Telephone: (510) 657-5900
  (Address, including zip code, and telephone number, including area code, of
                   Registrant's principal executive offices)

                                  Brad Mattson
                            Chief Executive Officer
                            Mattson Technology, Inc.
                               2800 Bayview Drive
                           Fremont, California 94538
                           Telephone: (510) 657-5900
 (Name, address, including zip code, and telephone number, including area code,
                             of agent for service)

                               ----------------

                                   COPIES TO:
           Bradley J. Rock                           Justin P. Klein
         Diane Holt Frankle                        Michael J. Konowal
  Gray Cary Ware & Freidenrich LLP         Ballard Spahr Andrews & Ingersoll,
         400 Hamilton Avenue                               LLP
  Palo Alto, California 94301-1825           1735 Market Street, 51st Floor
           (650) 833-2000                      Philadelphia, PA 19103-7599
                                                     (215) 665-8500

   Approximate date of commencement of proposed sale to the public: As soon as
practicable after this Registration Statement becomes effective and all other
conditions to the proposed business combination and the merger described herein
have been satisfied or waived.

   If the securities being registered on this Form are being offered in
connection with the formation of a holding company and there is compliance with
General Instruction G, check the following box. [_]

   If this Form is filed to register additional securities for an offering
pursuant to Rule 462(a) under the Securities Act of 1933, as amended (the
"Securities Act"), check the following box and list the Securities Act
Registration Statement number of the earlier effective Registration Statement
for the same offering. [_]

   If this Form is a post-effective amendment filed pursuant to Rule 462(d)
under the Securities Act, check the following box and list the Securities Act
registration statement number of the earlier effective Registration Statement
for the same offering. [_]

                        CALCULATION OF REGISTRATION FEE

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                                                       Proposed
                                          Proposed      Maximum
 Title of Each Class of     Amount        Maximum      Aggregate   Amount of
    Securities to be         to be     Offering Price  Offering   Registration
       Registered        Registered(1)  Per Share(2)   Price(2)      Fee(2)
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Common Stock Par Value
 $0.001 per share......    5,040,000       $16.79     $84,641,348   $22,346
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(1)  Represents the number of shares of common stock of the Registrant which
     may be issued to the former shareholders and optionholders of
     CFM Technologies, Inc. ("CFM") pursuant to the transactions described
     herein. The shares to be issued to STEAG Electronic Systems AG ("STEAG")
     are not being registered hereunder. Pursuant to Rule 14a-6(j), no
     registration fee with respect to the shares to be issued to STEAG is being
     paid.
(2)  Each share of common stock of CFM (and each option to purchase shares of
     CFM) will be converted into the right to receive 0.5223 shares of common
     stock of the Registrant pursuant to the merger with CFM described herein.
     Pursuant to Rule 457(f)(1) under the Securities Act, the registration fee
     has been calculated based on the average of the high and low prices per
     share of the CFM common stock to be cancelled in the exchange as reported
     on the Nasdaq National Market on September 19, 2000.

                               ----------------

   The Registrant hereby amends this Registration Statement on such date or
dates as may be necessary to delay its effective date until the Registrant
shall file a further amendment which specifically states that this Registration
Statement shall thereafter become effective in accordance with Section 8(a) of
the Securities Act of 1933 or until the Registration Statement shall become
effective on such date as the Commission, acting pursuant to said Section 8(a),
may determine.

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++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ +The information in this joint proxy statement-prospectus is not complete and + +may be changed. Mattson may not issue the common stock to be issued in + +connection with the transactions described in this joint proxy statement- + +prospectus until the registration statement filed with the Securities and + +Exchange Commission is effective. This joint proxy statement-prospectus is + +not an offer to sell these securities and it is not soliciting an offer to + +buy these securities in any state where the offer or sale is not permitted. + +Any representation to the contrary is a criminal offense. + ++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++ SUBJECT TO COMPLETION, DATED SEPTEMBER 25, 2000. [MATTSON LOGO] [CFM LOGO] TO THE STOCKHOLDERS OF MATTSON TECHNOLOGY, INC. AND THE SHAREHOLDERS OF CFM TECHNOLOGIES, INC. A BUSINESS COMBINATION AND MERGER PROPOSAL--YOUR VOTE IS VERY IMPORTANT! Mattson Technology, Inc. ("Mattson") has entered into definitive agreements to acquire from STEAG Electronic Systems AG ("STEAG") all the subsidiaries comprising STEAG's semiconductor equipment division (the "STEAG Semiconductor Division") and for a Mattson subsidiary to merge with CFM Technologies, Inc. ("CFM"). The transactions with each of STEAG and CFM (together referred to herein as the "Transactions") are mutually conditioned on one another and are required to close simultaneously. The combined company following the closing of the Transactions, which will continue to operate under the name Mattson Technology, Inc., will become one of the world's top 15 semiconductor industry equipment suppliers, based on pro forma 2000 annual sales, thereby attaining a critical size that is becoming an increasingly important element to successfully compete in the semiconductor equipment industry. The combination of the semiconductor equipment businesses of Mattson, STEAG, and CFM will also give Mattson a leadership position in more than one product line: the STEAG Semiconductor Division ranks second worldwide, based on annual sales, in rapid thermal process (RTP) equipment systems, Mattson ranks first worldwide based on annual sales in plasma-based (or so-called "dry") strip equipment systems, and the combination of the chemical (or so-called "wet") strip processing businesses of the STEAG Semiconductor Division and CFM will place the combined company in the first tier of suppliers in that product market. Mattson plans to organize the combined businesses into three product groups: plasma products, thermal products, and wet processing products. Each product group will have a division president reporting to company headquarters which will remain in Fremont, California. See "Risk Factors" beginning on page 12 for a discussion of certain risks that the stockholders of Mattson and the shareholders of CFM should consider in determining how to vote on the proposed Transactions. This joint proxy statement-prospectus contains forward-looking statements. See "Risk Factors-Special Note Regarding Forward Looking Statements." Neither the Securities and Exchange Commission nor any state securities commission has approved or disapproved of the shares of Mattson common stock to be issued in connection with the Transactions nor determined whether this joint proxy statement-prospectus is adequate or accurate. Any representation to the contrary is a criminal offense. This joint proxy statement-prospectus does not constitute an offer to sell, or a solicitation of an offer to purchase, the securities covered by this joint proxy statement-prospectus, or the solicitation of a proxy, in any jurisdiction, to or from any person, to whom or from whom it is unlawful to make such offer, solicitation of an offer, or proxy solicitation in such jurisdiction. Neither the delivery of this joint proxy statement-prospectus nor any distribution of securities pursuant to this joint proxy statement- prospectus shall, under any circumstances, create any implication that there has been no change in the information set forth or incorporated into this joint proxy statement-prospectus by reference or in the affairs of Mattson, the STEAG Semiconductor Division, or CFM, since the date of this joint proxy statement- prospectus. Under the Strategic Business Combination Agreement (the "Combination Agreement") dated as of June 27, 2000 with STEAG, Mattson will acquire the eleven subsidiaries which comprise the STEAG Semiconductor Division (the "STEAG Semiconductor Subsidiaries") in exchange for issuing 11,850,000 shares of Mattson common stock to STEAG upon the closing. As a result, STEAG will hold approximately 32% of the outstanding common stock of Mattson following the completion of the Transactions. At the closing, Mattson will also grant options to purchase 850,000 shares of common stock to employees of the STEAG Semiconductor Division. Mattson, STEAG, and Brad Mattson have also agreed to enter into a Stockholder Agreement (the "Stockholder Agreement") providing for, among other things, the expansion of Mattson's board of directors from five members to seven, the election of two persons designated by STEAG to Mattson's board of directors (Dr. Jochen Melchior, who will be the initial Chairman of the Board of the combined company, and Dr. Hans-Georg Betz), restrictions on future acquisitions or dispositions of Mattson common stock by STEAG, and registration rights in favor of STEAG. The terms of the transaction with STEAG are more fully described in this joint proxy statement-prospectus and in the Combination Agreement and Stockholder Agreement, which are attached hereto as Annex A and Annex B, and are incorporated herein by reference.
Under the Agreement and Plan of Merger (the "Merger Agreement") dated as of June 27, 2000 with CFM, Mattson will acquire CFM in a stock-for-stock merger in which Mattson will issue 0.5223 shares of Mattson's common stock for each share of CFM common stock outstanding at the closing (which would represent approximately 4,215,000 shares of Mattson common stock as of September 4, 2000). As a result of the merger, shareholders of CFM will hold in the aggregate approximately 12% of the outstanding common stock of Mattson following the completion of the Transactions. In addition to the share issuance, Mattson will assume all outstanding CFM stock options, based on the same 0.5223 exchange ratio. As of September , 2000, CFM had options to purchase approximately 1,782,000 shares of CFM common stock outstanding, which would become options to purchase approximately 930,740 shares of Mattson common stock upon completion of the Transactions. Mattson has agreed, at the closing, to issue additional options to purchase 500,000 shares of its common stock to employees of CFM. Mr. James J. Kim, a current member of the board of directors of CFM, will join Mattson's board of directors at the closing. The terms of the transaction with CFM are more fully described in this joint proxy statement- prospectus and in the Merger Agreement which is attached hereto as Annex C and incorporated herein by reference. The Transactions will be accounted for by Mattson as purchases. The merger with CFM is intended to qualify as a tax-free reorganization for purposes of U.S. tax law. Following the Transactions, Mattson's common stock will continue to be listed on the Nasdaq National Market System under the symbol "MTSN." The Transactions are subject to, among other things, the approval by the stockholders of Mattson of the proposed share issuance in connection with the Transactions (including an option plan share reserve increase to cover the options to be issued in connection with the Transactions), the approval by the shareholders of CFM of the Merger Agreement, and other customary closing conditions. Clearance of the Transactions under U.S. and German antitrust laws has already been obtained. The actual closing of the Transactions is expected to occur in early January 2001. The parties agreed to close the Transactions after January 1, 2001 because of certain German tax and accounting considerations. However, after approval by Mattson stockholders and CFM shareholders and the satisfaction of all other closing conditions not within the control of the parties, the parties may, if prior to December 1, 2000, take a pre-closing step at which all remaining closing conditions, other than the exchange of the Mattson shares and arrival of January 1, 2001, will either be considered fulfilled or irrevocably waived. This is intended to reduce any risk that the Transactions will not close. This pre-closing step could take place as early as November [ ], 2000. The board of directors of Mattson has approved the proposed issuance of shares of Mattson common stock and the grant of Mattson stock options pursuant to the Transactions and unanimously recommends that its stockholders vote FOR the proposed share issuance and increase in the option plan share reserve to complete the Transactions. Likewise, the board of directors of CFM has approved the Merger Agreement and merger with a subsidiary of Mattson and recommends that CFM's shareholders vote FOR the approval of the Merger Agreement. Detailed information about the Transactions is contained in this joint proxy statement- prospectus. The boards of directors of both Mattson and CFM urge you to read this document, including the section describing the risk factors that begins on page 12. In addition to voting on the proposed share issuance and option plan share reserve increase in connection with the Transactions, the stockholders of Mattson (and not the shareholders of CFM) are asked to approve a second proposal to further increase the number of shares reserved for issuance under the Mattson Amended and Restated 1989 Stock Option Plan (the "Stock Option Plan") by 750,000 shares, to approve a third proposal to increase the number of shares reserved for issuance under the Mattson 1994 Employee Stock Purchase Plan (the "Purchase Plan") by 250,000 shares, to approve a fourth proposal to amend Mattson's Certificate of Incorporation to increase the number of authorized shares of common stock from 60 million shares to 120 million shares, and to approve a fifth proposal to amend Mattson's Certificate of Incorporation to increase the number of directors of Mattson from five to seven and to change the procedure for filling board vacancies. However, the approval of none of these four additional proposals is required in order to approve and effect the Transactions. The increase in the number of shares reserved for issuance under both the Stock Option Plan and the Purchase Plan will allow Mattson to continue to provide meaningful equity incentives to attract, motivate, and retain employees and officers following completion of the Transactions. The amendment to Mattson's Certificate of Incorporation to increase the authorized number of shares will provide the Mattson board of directors increased flexibility to issue shares for various corporate purposes, including stock splits, issuances of shares in connection with acquisitions of other businesses, or the raising of additional capital through the sale of equity securities, actions that would be significantly constrained under Mattson's current Certificate of Incorporation following completion of the Transactions. However, Mattson's board of directors has no current intent, plans, arrangements, or agreements to issue any of the proposed additional authorized shares of common stock. The amendment to Mattson's Certificate of Incorporation to increase the number of directors from five to seven and to change the procedure for filling vacancies is consistent with the terms of the Transactions and will provide room on Mattson's board for the addition of two directors designated by STEAG.
No vote of the sole shareholder of STEAG is required in order to effect the Transactions. The dates, times and places of the two special meetings are as follows: For CFM shareholders: For Mattson stockholders: 1:00 p.m. 10:00 a.m. October , 2000 October , 2000 Sheraton Great Valley Hotel Newark Hilton 707 East Lancaster Avenue 39900 Balentine Drive Frazer, Pennsylvania 19355 Newark, California 94560 Your vote is very important, regardless of the number of shares you own. Whether or not you plan to attend either special meeting, please vote as soon as possible to make sure that your shares are represented at the meeting. Both Brad Mattson and Roger Carolin, the Chief Executive Officers of Mattson and CFM, respectively, strongly support the Transactions and join with their boards of directors in enthusiastically recommending that you vote, in the case of Mattson stockholders, in favor of the issuance of shares and increase in the Stock Option Plan share reserve in connection with the Transactions, and in the case of CFM shareholders, in favor of the Merger Agreement and merger with Mattson. Roger A. Carolin Brad Mattson President and Chief Executive Chairman and Chief Executive Officer Officer Mattson Technology, Inc. CFM Technologies, Inc. This joint proxy statement-prospectus is dated October , 2000, and is first being mailed to stockholders of Mattson and shareholders of CFM on or about October , 2000. ADDITIONAL INFORMATION This joint proxy statement-prospectus incorporates important business and financial information about Mattson and CFM from other documents that are not included in or delivered with the joint proxy statement-prospectus. This information is available to you without charge upon your written or oral request. You can obtain the documents incorporated by reference in this joint proxy statement-prospectus by requesting them in writing or by telephone or over the Internet from the appropriate company at one of the following addresses: Mattson Technology, Inc. CFM Technologies, Inc. Peter Brown, Corporate Marketing Jeff Randall, Chief Financial Manager Officer 2800 Bayview Drive 150 Oaklands Boulevard Fremont, California 94538 Exton, Pennsylvania 19341 Phone: (510) 657-5900 Phone: (610) 280-8509 E-Mail: Peter.Brown@mattson.com E-Mail: Jeff.Randall@cfmtech.com Web Address: http://www.mattson.com Web Address: http://www.cfmtech.com If you would like to request any documents, please do so by October , 2000 in order to receive them before the special meetings. See "Where You Can Find More Information" that begins on page vii.
[LOGO OF MATTSON TECHNOLOGY, INC.] MATTSON TECHNOLOGY, INC. 2800 Bayview Drive FREMONT, CALIFORNIA 94538 NOTICE OF SPECIAL MEETING OF STOCKHOLDERS TO BE HELD OCTOBER , 2000 TO THE STOCKHOLDERS OF MATTSON TECHNOLOGY, INC.: A Special Meeting of the stockholders of Mattson Technology, Inc. ("Mattson") will be held on , October , 2000, beginning at 10:00 A.M., local time, at the Newark Hilton, 39900 Balentine Drive, Newark, California 94560, to consider and vote upon the following proposals: 1. To authorize (A) the issuance by Mattson of an aggregate of 16,890,000 shares of its common stock pursuant to: (i) the Strategic Business Combination Agreement (the "Combination Agreement") between Mattson and STEAG Electronic Systems AG ("STEAG") under which Mattson will directly or indirectly acquire 100% of the stock of all of the subsidiaries comprising the semiconductor equipment division of STEAG, and (ii) the Agreement and Plan of Merger (the "Merger Agreement") between and among Mattson, M2C Acquisition Corporation, a wholly owned subsidiary of Mattson, and CFM Technologies, Inc. ("CFM"), under which CFM will become a wholly owned subsidiary of Mattson, including the assumption of outstanding options to acquire CFM stock, and (B) an amendment to Mattson's Amended and Restated 1989 Stock Option Plan (the "Stock Option Plan") to increase the number of shares reserved for issuance thereunder by 1,350,000 shares to support the issuance by Mattson of options upon the closing of the transactions required by the Combination Agreement and the Merger Agreement to the employees of the acquired businesses. 2. To approve an amendment to the Stock Option Plan to further increase the number of shares reserved for issuance thereunder by 750,000 shares (in addition to the Stock Option Plan reserve increase included in proposal 1). 3. To approve an amendment to Mattson's 1994 Employee Stock Purchase Plan (the "Purchase Plan") to increase the number of shares reserved for issuance thereunder by 250,000 shares. 4. To approve an amendment to Mattson's Certificate of Incorporation to increase the authorized number of shares of common stock available for issuance from 60 million shares to 120 million shares. 5. To approve an amendment to Mattson's Certificate of Incorporation to increase the number of directors on Mattson's board from five to seven and to change the procedure for filling board vacancies. 6. To act upon such other matters as may properly come before the meeting. The board of directors of Mattson unanimously recommends that stockholders vote FOR the approval of the issuance of shares and increase in the Stock Option Plan share reserve needed to complete the Transactions, FOR the additional amendment of the Stock Option Plan, FOR the amendment of the Purchase Plan, FOR the proposed increase in the authorized number of shares under Mattson's Certificate of Incorporation, and FOR the proposed increase in the size of Mattson's board and change in the procedure for filling board vacancies as set forth in Mattson's Certificate of Incorporation. Only stockholders of record at the close of business on September , 2000 will be entitled to vote at the meeting. A complete list of stockholders entitled to vote on the above matters at the meeting, arranged in alphabetical order, indicating the respective address of each such stockholder, and the number of shares
registered in the name of each such stockholder, will be open to the examination of any stockholder during ordinary business hours, at the offices of Mattson, for a period of ten (10) days prior to the date of the meeting. Such list shall also be produced and kept at the time and place of the meeting, for the duration of such, and may be inspected by any stockholder who is present at the meeting. Each of the stockholders of record is cordially invited to be present and vote at the meeting in person. By order of the board of directors, Brad Mattson Chief Executive Officer Fremont, California October , 2000 You are cordially invited to attend the meeting. However, whether or not you plan to attend the meeting in person, please complete, date, and sign the accompanying proxy and mail it promptly in the return envelope to assure that your shares are represented at the meeting. If you later desire to revoke your proxy, you may do so at any time before it is exercised.
[LOGO OF CFM TECHNOLOGIES, INC.] CFM TECHNOLOGIES, INC. 150 Oaklands Blvd. EXTON, PA 19341 NOTICE OF SPECIAL MEETING OF SHAREHOLDERS TO BE HELD OCTOBER , 2000 TO OUR SHAREHOLDERS: You are invited to be present either in person or by proxy at the Special Meeting of Shareholders of CFM Technologies, Inc. to be held at the Sheraton Great Valley Hotel, 707 East Lancaster Avenue, Frazer, Pennsylvania 19355, on , October , 2000, beginning at 1:00 P.M., for the following purposes: 1. To consider and vote on a proposal to approve and adopt the Agreement and Plan of Merger, dated as of June 27, 2000, by and among Mattson Technology, Inc., M2C Acquisition Corporation, a wholly owned subsidiary of Mattson, and CFM Technologies, Inc. 2. To act upon such other matters as may properly come before the meeting. The board of directors of CFM unanimously recommends that the shareholders vote FOR the proposal to approve and adopt the Agreement and Plan of Merger, dated as of June 27, 2000, by and among Mattson Technology, Inc., M2C Acquisition Corporation, and CFM Technologies, Inc. The board of directors of CFM has fixed the close of business on October , 2000 as the record date for determining shareholders entitled to notice of and to vote at the meeting and any adjournments or postponements thereof. The board of directors of CFM hopes that you will find it convenient to attend the meeting in person, but whether or not you plan to attend, please sign, date, and return the enclosed proxy promptly to ensure your shares are represented at the meeting. Shareholders who execute proxies retain the right to revoke them (in writing) at any time prior to the voting thereof. A return envelope, which requires no postage if mailed in the United States, is enclosed for your convenience. By order of the board of directors, Lorin J. Randall Secretary Exton, Pennsylvania October , 2000 YOUR VOTE IS IMPORTANT. PLEASE COMPLETE, SIGN, DATE, AND RETURN YOUR PROXY. HOLDERS OF CFM COMMON STOCK SHOULD NOT SEND STOCK CERTIFICATES WITH THEIR PROXY CARDS.
TABLE OF CONTENTS Page ---- WHERE YOU CAN FIND MORE INFORMATION....................................... vii INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE........................... vii WHO CAN HELP ANSWER YOUR QUESTIONS........................................ viii QUESTIONS AND ANSWERS ABOUT THE TRANSACTIONS.............................. 1 SUMMARY OF THE JOINT PROXY STATEMENT-PROSPECTUS........................... 4 The Companies........................................................... 4 The Structure of the Transactions....................................... 5 Treatment of STEAG and CFM Stock Options................................ 6 Relative Percentages of Ownership....................................... 6 Tax Consequences........................................................ 6 Board Composition....................................................... 6 Reasons for the Transactions............................................ 7 Recommendation of the Boards of Directors............................... 7 Fairness Opinions of Financial Advisors................................. 7 Stockholder Approvals................................................... 8 The Special Meetings.................................................... 8 Interests of Directors and Officers of Mattson, STEAG, and CFM in the Transactions........................................................... 8 Accounting Treatment.................................................... 10 Regulatory Approvals.................................................... 10 Dissenters' Rights...................................................... 10 RISK FACTORS.............................................................. 12 Special Note Regarding Forward-Looking Statements....................... 12 Risks Related to the Transactions....................................... 12 Risks Relating to Mattson's Business Following Consummation of the Transactions........................................................... 17 MATTSON SELECTED HISTORICAL FINANCIAL INFORMATION......................... 25 STEAG SEMICONDUCTOR DIVISION SELECTED HISTORICAL FINANCIAL INFORMATION.... 26 CFM SELECTED HISTORICAL FINANCIAL INFORMATION............................. 27 PRO FORMA COMBINED CONDENSED FINANCIAL INFORMATION........................ 29 Unaudited Pro Forma Combined Condensed Balance Sheet.................... 30 Unaudited Pro Forma Combined Condensed Statement of Operations ......... 31 Unaudited Pro Forma Combined Condensed Consolidated Statement of Operations............................................................. 32 Notes to Unaudited Condensed Combined Pro Forma Financial Statements.... 33 COMPARATIVE PER SHARE DATA ............................................... 34 MARKET PRICE DATA AND DIVIDEND POLICY..................................... 35 THE MATTSON SPECIAL MEETING............................................... 37 Date, Time and Place of Meeting......................................... 37 Purpose of the Mattson Special Meeting.................................. 37 Record Date and Outstanding Shares...................................... 37 Share Ownership of Management and Certain Stockholders.................. 37 Vote Required........................................................... 37 Quorum; Abstentions..................................................... 38 Solicitation of Proxies; Expenses....................................... 38 Voting of Proxies....................................................... 38 Recommendation of the Board of Directors................................ 39 THE CFM SPECIAL MEETING................................................... 40 Date, Time and Place of Meeting......................................... 40 Purpose of the CFM Special Meeting...................................... 40 Record Date and Outstanding Shares...................................... 40 Share Ownership of Management and Certain Shareholders.................. 40 Vote Required........................................................... 40 i
Page ---- Quorum; Abstentions..................................................... 40 Solicitation of Proxies; Expenses....................................... 41 Voting of Proxies....................................................... 41 Rights of Dissenting Shareholders....................................... 41 Recommendation of the Board of Directors................................ 42 PROPOSAL ONE (FOR MATTSON STOCKHOLDERS): APPROVAL OF ISSUANCE OF SHARES AND INCREASE IN OPTION PLAN SHARE RESERVE IN CONNECTION WITH THE TRANSACTIONS. (FOR CFM SHAREHOLDERS): APPROVAL OF ADOPTION OF THE MERGER AGREEMENT AND THE MERGER CONTEMPLATED THEREUNDER....................................... 43 Background of the Transactions.......................................... 43 Mattson's Reasons for the Transactions.................................. 49 Recommendation of Mattson's Board of Directors.......................... 51 Opinion of Mattson's Financial Advisor.................................. 51 Interests of Mattson's Directors, Officers, and Affiliates in the Transactions............................................................ 56 CFM's Reasons for the Merger............................................ 57 Recommendation of CFM's Board of Directors.............................. 59 Opinion of CFM's Financial Advisor, UBS Warburg LLC..................... 60 Interests of CFM's Directors, Officers, and Affiliates in the Transactions............................................................ 66 Material Federal Income Tax Consequences................................ 68 Anticipated Accounting Treatment of the Transactions.................... 69 Regulatory Filings and Approvals Required to Complete the Transactions.. 69 Appraisal or Dissenters' Rights......................................... 69 Restrictions on Sales of Shares by Affiliates........................... 70 THE STRATEGIC BUSINESS COMBINATION AGREEMENT.............................. 71 Result of Business Combination.......................................... 71 Organization of New German Corporation.................................. 71 Closing of the Business Combination; Consideration...................... 71 Time of Closing......................................................... 71 Post-Closing Cash Adjustments........................................... 72 Conditions to The Business Combination.................................. 73 Representations and Warranties.......................................... 74 Covenants; Conduct of Business Prior To The Business Combination........ 74 Limitation on Other Negotiations........................................ 78 Additional Agreements and Covenants..................................... 78 Termination............................................................. 80 Indemnification......................................................... 82 AGREEMENTS RELATED TO THE BUSINESS COMBINATION............................ 83 Stockholder Agreement................................................... 83 Voting Agreement Between STEAG and Brad Mattson......................... 86 Transition Services Agreement........................................... 87 THE MERGER AGREEMENT...................................................... 88 Effective Time of the Merger............................................ 88 Preliminary Closing..................................................... 88 Merger Consideration.................................................... 88 Conditions to the Merger................................................ 88 Representations and Warranties.......................................... 90 Covenants; Conduct of Business Prior to the Merger...................... 90 Limitation on Discussing or Negotiating Other Acquisition Proposals..... 93 Indemnification by CFM as the Surviving Corporation..................... 94 Employee Agreements and Benefit Plans................................... 94 ii
Page ---- Termination of the Merger Agreement..................................... 95 Agreements Related to the Merger Agreement.............................. 98 Voting Agreements....................................................... 99 COMPARISON OF RIGHTS OF HOLDERS OF MATTSON COMMON STOCK AND CFM COMMON STOCK.................................................................... 101 Fiduciary Duties of Directors........................................... 108 Anti-Takeover Laws...................................................... 110 MANAGEMENT OF MATTSON AFTER THE TRANSACTIONS.............................. 113 Board of Directors of Mattson........................................... 113 Board Meetings and Committees........................................... 114 Compensation of Directors............................................... 115 Executive Officers...................................................... 116 DESCRIPTION OF MATTSON CAPITAL STOCK...................................... 118 Common Stock............................................................ 118 Preferred Stock......................................................... 118 PROPOSALS RELATING TO AMENDING MATTSON EQUITY COMPENSATIONS PLANS......... 119 Historical Executive Compensation....................................... 119 Stock Options Granted During Fiscal 1999................................ 120 Option Exercises in Last Fiscal Year and Fiscal Year-End Option Values.. 121 Compensation Committee Interlocks and Insider Participation............. 121 Allocation of Benefits Under Stock Option and Stock Purchase Plans...... 122 PROPOSAL TWO (FOR MATTSON STOCKHOLDERS ONLY): APPROVAL OF INCREASE IN SHARES RESERVED FOR ISSUANCE UNDER THE AMENDED AND RESTATED 1989 STOCK OPTION PLAN.............................................................. 122 Description of Plan..................................................... 123 General................................................................. 123 Shares Subject to Plan.................................................. 123 Administration.......................................................... 123 Eligibility............................................................. 124 Terms and Conditions of Options......................................... 124 Terms and Conditions of Non-Employee Director Options................... 125 Transfer of Control..................................................... 125 Summary of United States Federal Income Tax Consequences................ 126 Incentive Stock Options............................................... 126 Non-Statutory Stock Options........................................... 126 Vote Required and Recommendation of the Board of Directors.............. 127 PROPOSAL THREE (FOR MATTSON STOCKHOLDERS ONLY): APPROVAL OF INCREASE IN SHARES RESERVED FOR ISSUANCE UNDER 1994 EMPLOYEE STOCK PURCHASE PLAN..... 128 General................................................................. 128 Description of Plan..................................................... 128 Summary of United States Federal Income Tax Consequences................ 129 Recommendation of the Board of Directors................................ 130 PROPOSALS RELATING TO AMENDING MATTSON'S CERTIFICATE OF INCORPORATION..... 131 PROPOSAL FOUR (FOR MATTSON STOCKHOLDERS ONLY): APPROVAL OF AMENDMENT TO THE CERTIFICATE OF INCORPORATION TO INCREASE THE NUMBER OF AUTHORIZED SHARES OF COMMON STOCK................................................... 131 Background.............................................................. 131 Purpose and Effect of The Amendment..................................... 131 Vote Required and Board of Directors' Recommendation.................... 132 iii
Page ---- PROPOSAL FIVE (FOR MATTSON STOCKHOLDERS ONLY): APPROVAL OF AMENDMENT TO THE CERTIFICATE OF INCORPORATION TO INCREASE THE NUMBER OF DIRECTORS OF MATTSON.................................................................. 133 Background.............................................................. 133 Purpose and Effect of The Amendment..................................... 133 Vote Required and Board of Directors' Recommendation.................... 133 BUSINESS OF MATTSON....................................................... 135 General................................................................. 135 Overview................................................................ 135 Industry Background..................................................... 135 History of Increasing Semiconductor Manufacturing Productivity.......... 135 Equipment Productivity Has Declined..................................... 136 The Mattson Solution.................................................... 137 The Mattson Strategy.................................................... 138 Markets and Applications................................................ 139 The Aspen Strip......................................................... 141 The Aspen RTP (FR3)..................................................... 143 The Aspen LiteEtch...................................................... 143 EpiPro Systems.......................................................... 143 Customer Support........................................................ 144 Sales and Marketing..................................................... 144 Customers............................................................... 145 Backlog................................................................. 145 Research, Development, and Engineering.................................. 145 Competition............................................................. 146 Manufacturing........................................................... 147 Intellectual Property................................................... 147 Employees............................................................... 148 Properties.............................................................. 148 Legal Proceedings....................................................... 149 MATTSON MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS.................................................... 150 Overview................................................................ 150 Results of Operations................................................... 151 Years Ended December 31, 1999 and 1998.................................. 151 Years Ended December 31, 1998, 1997..................................... 153 Quarterly Results of Operations......................................... 154 Three and Six Months Period Ended June 30, 2000 and 1999................ 155 Net Sales............................................................... 155 Gross Margin............................................................ 155 Research, Development and Engineering................................... 155 Selling, General and Administrative..................................... 155 Provision for Income Taxes.............................................. 156 Liquidity and Capital Resources......................................... 156 Recent Accounting Pronouncements........................................ 157 Quantitative and Qualitative Disclosures Regarding Market Risk.......... 157 SECURITY OWNERSHIP OF MANAGEMENT AND PRINCIPAL STOCKHOLDERS............... 158 BUSINESS OF THE STEAG SEMICONDUCTOR DIVISION.............................. 159 General................................................................. 159 Rapid Thermal Processing (RTP).......................................... 159 Chemical Vapor Deposition (CVD)......................................... 161 Wet Cleaning Systems.................................................... 161 Copper Plating.......................................................... 163 iv
Page ---- Customers.............................................................. 163 Sales and Support...................................................... 163 Suppliers.............................................................. 164 Competition............................................................ 164 Intellectual Property.................................................. 165 Litigation............................................................. 165 Employees.............................................................. 166 Properties............................................................. 166 STEAG SEMICONDUCTOR DIVISION MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS........................... 167 Overview............................................................... 167 Recent Developments.................................................... 169 Results of Operations.................................................. 170 Fiscal Year Ended December 31, 1999 Compared to Fiscal Year Ended December 31, 1998..................................................... 170 Liquidity and Capital Resources........................................ 172 Six Months Ended June 30, 2000 Compared to Six Months Ended June 30, 1999.................................................................. 173 Liquidity and Capital Resources........................................ 174 Qualitative and Quantitative Disclosures Above Market Risk............. 175 Security Ownership..................................................... 175 BUSINESS OF CFM.......................................................... 176 General................................................................ 176 Industry Background.................................................... 176 The CFM Solution....................................................... 178 Strategy............................................................... 179 Products............................................................... 179 Customers.............................................................. 181 Sales and Marketing.................................................... 182 Customer Satisfaction.................................................. 182 Backlog................................................................ 182 Research, Development and Engineering.................................. 182 Competition............................................................ 183 Manufacturing.......................................................... 183 Regulatory Matters..................................................... 184 Intellectual Property.................................................. 184 Employees.............................................................. 184 Litigation............................................................. 185 CFM MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS................................................... 187 Overview............................................................... 187 Results of Operations.................................................. 188 Years Ended October 31, 1999, 1998, and 1997........................... 188 Three Month and Nine Month Period Ended July 31, 2000 and 1999......... 189 Backlog................................................................ 191 Liquidity and Capital Resources........................................ 191 Litigation............................................................. 192 Impact of Recently Issued Accounting Standards......................... 194 PRINCIPAL SHAREHOLDERS OF CFM............................................ 195 REGULATORY MATTERS AFFECTING MATTSON, STEAG AND CFM...................... 195 LEGAL MATTERS............................................................ 195 EXPERTS.................................................................. 196 v
Page ---- STOCKHOLDER PROPOSALS TO BE PRESENTED AT NEXT ANNUAL MEETING............... 196 MATTSON INDEX TO FINANCIAL STATEMENTS...................................... F-1 STEAG SEMICONDUCTOR INDEX TO FINANCIAL STATEMENTS.......................... F-29 CFM INDEX TO CONSOLIDATED FINANCIAL STATEMENTS............................. F-56 APPENDIX: Annex A--Strategic Business Combination Agreement........................ A-1 Annex B--Stockholder Agreement........................................... B-1 Annex C--Agreement and Plan of Merger.................................... C-1 Annex D--Fairness Opinions............................................... D-1 Annex D-2--Fairness Opinions............................................. Annex E--Pennsylvania Dissenters' Rights................................. E-1 Annex F--Article Sixth of Mattson's Certificate of Incorporation......... F-1 vi
WHERE YOU CAN FIND MORE INFORMATION Mattson and CFM each file annual, quarterly, and special reports, proxy statements, and other information with the United States Securities and Exchange Commission (the "SEC"). Mattson's common stock is traded on the Nasdaq National Market ("Nasdaq") under the symbol "MTSN." CFM's common stock is traded on the Nasdaq under the symbol "CFMT." You may read and copy any document filed by Mattson or CFM at the SEC's public reference facilities or on the SEC's website at http://www.sec.gov, as discussed in more detail below. Neither STEAG nor any of the STEAG Semiconductor Subsidiaries is a reporting company and therefore no additional reports or financial information about STEAG or any of the STEAG Semiconductor Subsidiaries are publicly available. INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE The SEC allows Mattson and CFM to "incorporate by reference" the information they file with the SEC, which means that they can disclose important information by referring you to documents previously filed with the SEC. The information incorporated by reference is considered a part of this joint proxy statement-prospectus, and any later information that Mattson or CFM file with the SEC will automatically update and supersede this information. This joint proxy statement-prospectus is part of a registration statement on Form S-4 filed by Mattson with the SEC. Mattson incorporates by reference the documents listed below, and any additional documents filed by Mattson with the SEC between the date of this joint proxy statement-prospectus and the date of the Mattson special meeting. The documents Mattson incorporates by reference are: Mattson's annual report on Form 10-K for the fiscal year ended December 31, 1999; Mattson's quarterly report on Form 10-Q for the quarter ended March 31, 2000; and Mattson's quarterly report on Form 10-Q for the quarter ended June 30, 2000. CFM incorporates by reference the documents listed below and any documents that CFM may file with the SEC between the date of this joint proxy statement- prospectus and the date of the CFM special meeting. The documents CFM incorporates by reference are: CFM's annual report on Form 10-K for the fiscal year ended October 31, 1999; CFM's quarterly report on Form 10-Q for the quarter ended January 31, 2000; CFM's amended quarterly report on Form 10-Q/A for the quarter ended January 31, 2000; CFM's quarterly report on Form 10-Q for the quarter ended April 30, 2000; and CFM's quarterly report on Form 10-Q for the quarter ended July 31, 2000. Documents incorporated by reference are available without charge, excluding all exhibits unless such exhibits have been specifically incorporated by reference in this joint proxy statement-prospectus. You may obtain documents incorporated by reference by requesting them in writing or by telephone from the appropriate company as follows: Mattson Technology, Inc. CFM Technologies, Inc. 2800 Bayview Drive 150 Oaklands Boulevard Fremont, California 94538 Exton, Pennsylvania 19341 Attention: Peter Brown, Corporate Marketing Manager Attention: Jeff Randall, Chief Phone Number: (510) 657-5900 Financial Officer Phone Number: (610) 280-8509 vii
In order to ensure timely delivery of the documents, any requests should be made by October , 2000. In addition, copies of the documents incorporated by reference may be inspected and copied at the following public reference facilities maintained by the SEC: Judiciary Plaza Citicorp Center Seven World Trade Center Room 1024 500 West Madison 13th Floor 450 Fifth Street, Street New York, New York 10048 N.W. Suite 1400 Washington, D.C. Chicago, Illinois 20549 60661 Copies of these materials can also be obtained by mail at prescribed rates from the Public Reference Section of the SEC, 450 Fifth Street, N.W., Washington, D.C. 20549, or by calling the SEC at 1-800-SEC-0330. The SEC maintains a website that contains reports, proxy statements, and other information regarding each of Mattson and CFM. The address of the SEC website is http://www.sec.gov. Reports, proxy statements, and other information concerning Mattson and CFM can also be inspected at the Nasdaq National Market, Operations, 1735 K Street, N.W., Washington, D.C. Mattson has filed a registration statement under the Securities Act of 1933, as amended (the "Securities Act"), with the SEC with respect to the Mattson common stock to be issued under the Merger Agreement with CFM. This joint proxy statement-prospectus constitutes the prospectus of Mattson filed as part of the registration statement. This joint proxy statement-prospectus does not contain all of the information set forth in the registration statement because certain parts of the registration statement are omitted as provided by the rules and regulations of the SEC. You may inspect and copy the registration statement at any of the addresses listed above. WHO CAN HELP ANSWER YOUR QUESTIONS If you have additional questions about the Transactions, you should contact: For Mattson stockholders: For CFM shareholders: Mattson Technology, Inc. CFM Technologies, Inc. 2800 Bayview Drive 150 Oaklands Boulevard Fremont, California 94538 Exton, Pennsylvania 19341 Attention: Peter Brown, Attention: Jeff Randall, Chief Corporate Financial Officer Marketing Manager Phone Number: (610) 280-8509 Phone Number: (510) 657-5900 If you have additional questions about the solicitation of your proxy, you should contact: [Logo of MacKenzie Partners, Inc.] 156 Fifth Avenue New York, New York 10010 (212) 929-5500 (call collect) Call Toll Free (800) 322-2885 Mattson, the Mattson logo, Aspen, Aspen CVD, Aspen RTPFR\\3\\, Aspen LiteEtch, ICPSM, and EpiPro are trademarks of Mattson used in this joint proxy statement-prospectus. MARANGONI(R), Starfire(R), Poseidon STT(R), and ElectroDep 2000(R) are registered trademarks of the STEAG Semiconductor Subsidiaries used in this joint proxy statement-prospectus. Other product and brand names are trademarks or registered trademarks of their respective holders. viii
QUESTIONS AND ANSWERS ABOUT THE TRANSACTIONS Q: Why are Mattson, STEAG, and CFM engaging in the Transactions? A: Mattson, STEAG, and CFM are engaging in the Transactions because they believe the resultant synergy and combined strengths of their three companies's semiconductor equipment businesses will enable them to build one of the world's leading suppliers of semiconductor manufacturing process equipment. The combined enterprise, which will continue to operate under the name Mattson Technology, Inc., will become one of the world's top 15 semiconductor industry equipment suppliers, based on pro forma 2000 annual sales, thereby attaining a size or "critical mass" that is becoming increasingly important to successfully compete in the semiconductor equipment industry. The integration of the semiconductor equipment businesses of Mattson, STEAG, and CFM will also give Mattson a leadership position in more than one product line: the STEAG Semiconductor Division, which already ranks second worldwide in annual sales of rapid thermal process (RTP) equipment systems, will add to Mattson's No. 1 worldwide market position in strip equipment systems, and the combination of the wet processing businesses of the STEAG Semiconductor Division and CFM will place Mattson in the first tier of suppliers in the market for semiconductor wet processing equipment. Q: What will I receive in the Transactions? A: In connection with the merger, shareholders of CFM will receive 0.5223 shares of Mattson common stock for each share of CFM common stock they hold at closing, which will result in their holding in the aggregate approximately 12% of the outstanding common stock of Mattson following the Transactions. In addition, Mattson will assume all outstanding CFM stock options, based on the same 0.5223 exchange ratio. As of September 4 , 2000, CFM had 8,067,175 outstanding shares of common stock and 1,782,000 outstanding options to purchase shares of CFM common stock. At the time of closing, Mattson has agreed to issue additional options to purchase 500,000 shares of Mattson common stock to employees of CFM. Stockholders of Mattson will retain their existing shares of Mattson common stock. As a result of the Transactions, current Mattson stockholders will hold in the aggregate approximately 56% of the outstanding common stock of Mattson. As a result of the business combination, STEAG, the sole owner of the STEAG Semiconductor Division, will hold approximately 32% of the outstanding common stock of Mattson. Q: What stockholder approvals are needed for the Transactions? A: For Mattson, the affirmative vote of the holders of a majority of the votes present or represented by proxy and entitled to a vote at the special meeting, at which a quorum is present, is required for approval of the share issuances and the option plan reserve increase needed to complete the Transactions. Each holder of common stock is entitled to one vote per share. As of the record date, Mattson directors and officers and their affiliates owned in the aggregate approximately 18.9% of the outstanding shares, and Brad Mattson individually owned approximately 17.7% of the outstanding shares of Mattson. Pursuant to the voting agreements with each of STEAG and CFM, Brad Mattson has agreed to vote all of his shares in favor of the share issuances under the Transactions. For CFM, the affirmative vote of a majority of the votes cast by all shareholders of CFM's common stock is required to adopt the Merger Agreement. No vote shall be taken unless a quorum is present, in person or by proxy. If a quorum is not present, however, those present may vote to adjourn the meeting to such time and place as they may determine, at which time if a quorum is not then present, and at least 15 days has elapsed since the adjournment for lack of a quorum, those present shall constitute a quorum for the purpose of voting upon the CFM proposal set forth in this joint proxy statement-prospectus. CFM common shareholders are entitled to one vote per share. As of the record date, CFM directors and officers and their affiliates owned in the aggregate approximately 19.7% of the outstanding shares, and Christopher McConnell, Chairman of CFM's Board of Directors, individually owned approximately 14.0% of the outstanding shares. Pursuant to a voting agreement with Mattson, Christopher McConnell has agreed to vote all of his shares in favor of adoption of the Merger Agreement and approval of the merger. 1
Because STEAG is a privately-held corporation organized under the laws of the Federal Republic of Germany, approval by STEAG's sole shareholder, STEAG AG, is not required in order to effect the business combination. In accordance with German law, the Supervisory Board (Aufsichtsrat) and the Management Board (Vorstand) of STEAG previously approved the business combination. Q: Are Mattson stockholders and CFM shareholders voting on the same thing? No. Mattson stockholders are being asked to approve the proposed issuance by Mattson of approximately 16.9 million shares and a 1,350,000 share increase in the share reserve under the Stock Option Plan in connection with the Transactions. Such approval is required because Mattson is proposing to issue in aggregate approximately 44% of its total outstanding shares (based on the total number of shares outstanding following the share issuance). Under Nasdaq rules, Mattson is required to obtain stockholder approval to issue such a large number of its shares and to reserve shares under any compensation plans in which officers of Mattson may participate. CFM is not a party to the Combination Agreement between Mattson and STEAG, and therefore CFM shareholders are not required to vote to approve the business combination. CFM shareholders will be voting only on the proposed Merger Agreement and merger with Mattson. However, because the Transactions are mutually conditioned on one another and are required to close simultaneously, the failure to approve the Merger Agreement and merger between Mattson and CFM by the CFM shareholders would also result in termination of the proposed business combination between Mattson and the STEAG Semiconductor Division. Q: Are Mattson stockholders voting on any other proposals in addition to the Transactions? A: Yes. Mattson stockholders (but not CFM shareholders) are also being asked to approve a second proposal to increase the number of shares reserved for issuance under Mattson's Stock Option Plan by 750,000 shares (in addition to the 1,350,000 share reserve increase to be approved in connection with the transactions), to approve a third proposal to increase the number of shares reserved for issuance under Mattson's Purchase Plan by 250,000 shares, to approve a fourth proposal to amend Mattson's Certificate of Incorporation to increase the number of authorized shares of common stock from 60 million to 120 million shares, and to approve a fifth proposal to amend Mattson's Certificate of Incorporation to increase the number of directors of Mattson from five to seven and to change the procedure for filling board vacancies. However, it is important to note that approval of these four additional proposals is not required in order for the proposed share issuance and Stock Option Plan share reserve increase in connection with the Transactions to be approved or for the Transactions to be consummated. The further increase in the number of shares reserved for issuance under the Stock Option Plan and Purchase Plan will allow Mattson, on a going-forward basis, to continue to provide meaningful equity incentives to attract, motivate, and retain employees and officers. The amendment of Mattson's Certificate of Incorporation to increase the number of authorized shares will provide the board of directors of Mattson increased flexibility to issue shares for various corporate purposes, including stock splits (which usually take the form of a stock dividend), issuances of shares in connection with acquisitions of other businesses or the raising of additional capital through the sale of equity securities, actions that would be significantly constrained under Mattson's current Certificate of Incorporation. However, Mattson's board of directors has no current intent, plans, arrangements, or agreements to issue any of the proposed additional authorized shares of common stock. The amendment of Mattson's Certificate of Incorporation to increase the number of directors from five to seven and to change the procedure for filling board vacancies is consistent with the terms of the Transactions and will allow room on Mattson's board for the two director- nominees of STEAG. Q: What do I need to do now? A: After carefully reading and considering the information contained in this joint proxy statement-prospectus, please respond by completing, signing, and dating your proxy card or voting instructions and returning it in the enclosed postage paid envelope, or, if available, by submitting your proxy or voting instructions by telephone or through the Internet as soon as possible so that your shares may be represented at your company's special meeting. Q: What if I do not vote? A: If a Mattson stockholder fails to respond, the risk is increased that a quorum, which is a 2
majority of the outstanding voting shares of Mattson common stock, may not be obtained. If a quorum is not obtained at the special meeting or any continuation of the special meeting, the share issuance under the Transactions will not be approved. If a CFM shareholder fails to respond, it will have the same effect as a vote against the Merger Agreement. Q: Can I change my vote after I have delivered my proxy? A: Yes. You can change your vote at any time before your proxy is voted at the relevant special meeting. You can do this in one of three ways. First, you can revoke your proxy. Second, you can submit a new proxy. If you choose either of these two methods, you must submit your notice of revocation or your new proxy to the Secretary of Mattson or CFM, as appropriate, before the relevant special meeting. If your shares are held in an account at a brokerage firm or bank, you should contact your brokerage firm or bank to change your vote. Third, if you are a holder of record, you can attend the special meeting and vote in person. If you submit your proxy or voting instructions electronically through the Internet or by telephone, you can change your vote by submitting a proxy at a later date, using the same procedures, in which case your later submitted proxy will be recorded and your earlier proxy revoked. Q: If I am a CFM shareholder, should I send in my stock certificates to be exchanged now? A: No. After the merger between Mattson and CFM is completed, you will receive written instructions from the exchange agent on how to exchange your CFM stock certificates for shares of Mattson. Please do not send in your CFM stock certificates with your proxy. Q: Who is the exchange agent for the merger? A: Chase Mellon Shareholder Services LLP is the exchange agent. Its address and phone number is: 85 Challenger Road Ridgefield Park, NJ 07660 (201) 329-8285 Q: Where will my shares of Mattson common stock be listed? A. Shares of Mattson common stock will continue to be listed on the Nasdaq under the symbol "MTSN." Q: When do you expect the Transactions to be completed? A: The actual closing of the Transactions is expected to occur in early January 2001. The parties agreed that the closing would occur no earlier than January 1, 2001 because of certain German tax and accounting considerations applicable to STEAG. However, in order to reduce the risk that the Transactions will not close if approval by Mattson stockholders and CFM shareholders has been obtained and all other closing conditions that are beyond the parties' control have been satisfied by December 1, 2000, the parties will take a pre-closing step at which all remaining conditions other than the arrival of January 1, 2001, will either be fulfilled or irrevocably waived. This pre-closing step could take place as early as November 2000. Q. Who can help answer my questions? A. If you have any questions about either of the Transactions or how to submit your proxy, or if you need additional copies of this joint proxy statement-prospectus or the enclosed proxy card or voting instructions, you should contact the individuals listed below: If you are a Mattson stockholder, you should contact: Mattson Technology Inc. 2800 Bayview Drive Fremont, California 94538 Attention: Peter Brown, Corporate Marketing Manager Phone Number: (510) 657-5900 If you are a CFM shareholder, you should contact: CFM Technologies, Inc. 150 Oaklands Boulevard Exton, Pennsylvania 19341 Attention: Jeff Randall, Chief Financial Officer Phone Number: (610) 280-8509 3
SUMMARY OF THE JOINT PROXY STATEMENT-PROSPECTUS This summary highlights selected information from this document and may not contain all of the information that is important to you. To understand the Transactions fully and for a more complete description of the legal terms of the Transactions, you should read carefully this entire document and the other available information referred to in "Where You Can Find More Information" in the forepart of this joint proxy statement-prospectus. The Combination Agreement and the Merger Agreement are attached to this joint proxy statement- prospectus as Annex A and Annex C, respectively. Whether you are a stockholder of Mattson or a shareholder of CFM, both Mattson and CFM encourage you to read both the Combination Agreement and the Merger Agreement, as they are the main legal documents that govern the Transactions. Mattson has provided the information in this joint proxy statement- prospectus about Mattson, CFM has provided the information in this joint proxy statement-prospectus about CFM, and STEAG has provided the information in this joint proxy statement-prospectus about the STEAG Semiconductor Division. The risk factors beginning on page 12 should be considered carefully by the Mattson stockholders and the CFM shareholders in evaluating whether to approve, in the case of Mattson's stockholders, the share issuance and Stock Option Plan share reserve increase in connection with the Transactions, and, in the case of CFM's shareholders, the Merger Agreement and merger. These factors should be considered along with any additional risk factors in documents incorporated by reference in this joint proxy statement-prospectus and any other information included or incorporated by reference herein, including in conjunction with forward-looking statements made herein. THE COMPANIES Mattson Mattson is a leading supplier of semiconductor process equipment for photoresist strip/etch, chemical vapor deposition, epitaxial and rapid thermal processing. Mattson's products combine advanced process technology on a high productivity platform. In addition, through Mattson's international technical support organization and comprehensive warranty program, Mattson provides world class customer support. Nearly all of Mattson's tools are built on a single platform, known as the Aspen system. Each tool in the Aspen system shares the same principal architecture, including the main mechanical design, robotics, systems software, wafer handling interfaces, and wafer flow design. Mattson's Aspen platform is designed to deliver high throughput and low cost of ownership, enhancing the ability of manufacturers to achieve productivity gains. Mattson's product offerings include: . photoresist stripping systems that remove photoresist and residue from semiconductor wafers after photolithography and other processing steps such as etch; . isotropic etching systems that perform a variety of etch processes on semiconductor wafers; . plasma enhanced chemical vapor deposition (CVD) systems that deposit insulating or conducting films on semiconductor wafers; . rapid thermal processing (RTP) systems that heat semiconductor wafers during the manufacturing process; and . epitaxial processing systems that deposit a thin silicon film onto semiconductor wafers. Mattson's systems offer improvements in wafer manufacturing productivity and throughput over conventional single wafer systems and cluster tools. Mattson's unique multi-station, multi-chamber architecture significantly increases throughput without sacrificing process control. Mattson's systems also provide innovative technology to address technical or manufacturing problems of the semiconductor equipment industry, where traditional technologies have been unable to satisfy emerging process requirements. For example, Mattson's proprietary plasma strip source technology is capable of removing residues without the need for multiple acid steps, as required by traditional stripping systems. Mattson's Aspen III CVD system 4
has one of the first process chambers that can process either 200 or 300 millimeter wafers with only minor modifications. Mattson's objective is to enhance its market position as a leading supplier of advanced, high productivity manufacturing equipment to the worldwide semiconductor industry. To achieve this objective, Mattson seeks to deliver high productivity, cost-effective systems by leveraging the unique benefits of its Aspen platform, and Mattson intends to provide technology innovations to address the unmet needs of the semiconductor manufacturing industry. In addition, Mattson plans to increase its global market penetration, capitalize on its diversified product line, and take a leadership position in the emerging 300 millimeter market. Mattson markets its systems on a global basis, with sales support and service support offices in thirteen domestic and international locations. Mattson delivers superior customer support and service to enhance its long-term customer relationships. Mattson offers an extensive warranty, provides broad access to training, and maintains a global customer support infrastructure with local support personnel. Mattson's customers include nine of the top ten semiconductor manufacturers worldwide. Mattson's principal executive offices are located at 2800 Bayview Drive, Fremont, California 94538. Mattson's telephone number is (510) 657-5900. CFM CFM is a leading manufacturer of advanced cleaning equipment for the semiconductor industry. Its systems provide superior contamination control and processing capabilities using a totally enclosed processing chamber. Watermarks and other drying defects are eliminated through CFM's Direct-Displace(TM) IPA vapor drying technology. CFM believes that its patented Full-Flow(TM) technology and direct-displacement drying enable it to provide wet processing systems that address a variety of limitations inherent in conventional semiconductor wet processing systems, including wet benches and spray tools, resulting in significantly lower cost of ownership. CFM's principal executive offices are located at 150 Oaklands Boulevard, Exton, Pennsylvania 19341. CFM's telephone number is (610) 280-8300. STEAG Through the STEAG Semiconductor Division, STEAG is one of the world's leading suppliers of capital equipment for the semiconductor industry. The STEAG Semiconductor Division's broad technology portfolio includes rapid thermal processing (RTP), clean process, chemical vapor deposition (CVD), and copper plating. The STEAG Semiconductor Subsidiaries own manufacturing, sales, and support facilities located throughout the United States, Asia, and Europe. STEAG is also engaged in the optical storage and photomask businesses, neither of which is included in the business combination with Mattson. STEAG is a wholly owned subsidiary of STEAG AG, a power generation and electronics company based in Essen, Germany. STEAG's principal executive offices are located at Ruttenscheider Strasse 1- 3, 45128 Essen, Germany. STEAG's telephone number is 011-49-201-801-0. THE STRUCTURE OF THE TRANSACTIONS Under the Combination Agreement, Mattson will acquire the stock of those eleven subsidiaries comprising the STEAG Semiconductor Division. In consideration for all the equity interests in the STEAG Semiconductor Subsidiaries, Mattson will issue 11,850,000 shares of common stock to STEAG upon the closing. Mattson and STEAG have agreed to enter into a Stockholder Agreement on or before the Closing Date providing for, among other things, the expansion of Mattson's board of directors from five members to seven, the election of two persons designated by STEAG to Mattson's board of directors (Dr. Jochen Melchior, who will serve as initial Chairman of the Board of the combined company, and Dr. Hans-Georg Betz), certain restrictions on future acquisitions or dispositions of Mattson common stock by STEAG, and registration rights in favor of STEAG. The terms of the transaction with STEAG are more fully described in the Combination Agreement, which is attached hereto as Annex A, and in the Stockholder Agreement, which is attached hereto as Annex B. 5
Under the Merger Agreement with CFM, Mattson will acquire CFM in a stock- for-stock merger in which Mattson will issue 0.5223 shares of Mattson common stock for each share of CFM common stock issued and outstanding at the closing (which would represent approximately 4,215,000 shares of Mattson common stock as of September 4, 2000). A representative of CFM, James J. Kim, will join Mattson's board of directors at closing. The terms of the transaction with CFM are more fully described in the Merger Agreement, which is attached hereto as Annex C. The Transactions are mutually conditioned on one another and are required to close simultaneously. The Transactions are subject to, among other things, the approval of the share issuance and Stock Option Plan share reserve increase in connection with the Transactions by the stockholders of Mattson, the approval of the Merger Agreement and merger by the shareholders of CFM, clearance under the U.S. and German antitrust laws (each of which has already been obtained), and other customary closing conditions. The closing of the Transactions is expected to occur in early January 2001. The parties agreed that the closing would take place after January 1, 2001 because of certain German tax and accounting considerations applicable to STEAG. However, in order to reduce the risk that the transactions will not close if approval by Mattson stockholders and CFM shareholders has been obtained and all the other closing conditions beyond the control of the parties have been satisfied prior to December 1, 2000, the parties will take a pre-closing step at which all remaining conditions, other than the exchange of the Mattson shares and the arrival of January 1, 2001, either will be irrevocably waived or deemed fulfilled. This pre-closing step could take place as early as November , 2000. TREATMENT OF STEAG AND CFM STOCK OPTIONS None of the STEAG Semiconductor Subsidiaries has any outstanding stock options, and thus no stock options of any STEAG Semiconductor Subsidiary will be assumed by Mattson pursuant to the business combination. Pursuant to the merger, Mattson will assume all outstanding CFM stock options, based on the same merger exchange ratio of 0.5223. As of September 4, 2000, CFM had outstanding options to purchase approximately 1,782,000 shares of CFM common stock. At the closing, Mattson has agreed to issue options to purchase 850,000 shares of Mattson common stock to employees of the STEAG Semiconductor Division. Mattson has also agreed at the closing to issue options to purchase 500,000 shares of common stock to employees of CFM. Therefore, as an integral part of the approval by Mattson stockholders of the share issuance in connection with the Transactions, Mattson is also requesting that stockholders approve an increase in the number of shares reserved for issuance under the Stock Option Plan by 1,350,000 shares. RELATIVE PERCENTAGES OF OWNERSHIP Once the Transactions close, STEAG will hold approximately 32% of the outstanding common stock of Mattson on a non-diluted basis, and shareholders of CFM prior to the closing will hold in the aggregate approximately 12% of the outstanding common stock of Mattson on a non-diluted basis. Mattson stockholders prior to the closing will hold in the aggregate the remaining approximately 56% of the outstanding common stock on a non-diluted basis after the closing. TAX CONSEQUENCES The parties have structured the merger so that CFM and its shareholders who exchange their shares solely for shares of Mattson common stock will not recognize gain or loss for United States federal income tax purposes in connection with the merger. Mattson's stockholders also will not recognize gain or loss for United States federal income tax purposes in connection with the Transactions. BOARD COMPOSITION Following the Transactions, Mattson's board of directors will be composed of four of the five current directors of Mattson, with two new additional directors to be designated by STEAG (Dr. Jochen Melchior, who will serve as the initial Chairman of the Board of the combined company, and Dr. Hans-Georg Betz), and one of the existing directors of Mattson to be replaced by a director designated by CFM (James J. Kim), for a total of 6
seven directors. Senior management of Mattson will be comprised of personnel from each of Mattson, the STEAG Semiconductor Division, and CFM. REASONS FOR THE TRANSACTIONS Mattson, STEAG, and CFM have agreed to engage in the Transactions because of the synergy and market strength that would result by their combining their businesses. Following the consummation of the Transactions, Mattson would immediately become one of the top 15 semiconductor industry equipment suppliers, based on pro forma 2000 annual sales. This would represent the attainment of a critical mass that semiconductor equipment buyers are increasingly demanding from their vendors. In addition, Mattson would hold a market leadership position in multiple product lines. The STEAG Semiconductor Division currently ranks second worldwide in rapid thermal process (RTP) equipment systems. Mattson ranks first worldwide in plasma-based strip process equipment systems, and fifth in RTP. The combination of the wet processing businesses of the STEAG Semiconductor Division and CFM would also place Mattson in the first tier of suppliers in the market for semiconductor wet processing equipment. Thus, Mattson would become a multi-product, multi-technology company providing "one-stop shopping" to semiconductor equipment buyers. These complementary product lines will give Mattson the opportunity to gain market share in each. Mattson intends to become a "vendor of choice" to customers who are among the Top 20 semiconductor equipment buyers. Further, the consummation of the Transactions would give Mattson a truly global presence and reach. Both Mattson and CFM have a significant presence in Asia, and the STEAG Semiconductor Division has a strong presence in Asia and Europe. Finally, the settlement in connection with the proposed Transactions of the ongoing patent litigation between one of the STEAG Semiconductor Subsidiaries and CFM relating to one of CFM's patents relieves the combined wet processing business of the costs of that lawsuit and opens opportunities for sales of wet processing products of the STEAG Semiconductor Division in the U.S. RECOMMENDATION OF THE BOARDS OF DIRECTORS To Mattson stockholders: The Mattson board of directors believes that the proposed issuance of shares pursuant to the Transactions is fair to you and in your best interest and voted to approve the terms and provisions of both the Combination Agreement and the Merger Agreement, and unanimously recommends that you vote FOR the approval of the issuance of shares and increase in the Stock Option Plan share reserve in connection with the Combination Agreement and the Merger Agreement. The Mattson board of directors also unanimously recommends that you vote FOR the approval of the amendment to Mattson's Stock Option Plan and Purchase Plan to further increase the number of shares reserved for issuance thereunder by 750,000 shares and by 250,000 shares, respectively, FOR the amendment of Mattson's Certificate of Incorporation to increase the authorized number of shares of common stock available for issuance from 60 million shares to 120 million shares, and FOR the amendment of Mattson's Certificate of Incorporation to increase the designated number of directors of Mattson from five to seven and change the procedure for filling board vacancies. To CFM shareholders: The CFM board of directors believes that the merger is fair to you and in your best interest and unanimously voted to approve the Merger Agreement, and unanimously recommends that you vote FOR the adoption of the Merger Agreement. FAIRNESS OPINIONS OF FINANCIAL ADVISORS Opinion of Mattson's Financial Advisor. In deciding to approve the Transactions, the Mattson board of directors considered the opinion of its financial advisor, Alliant Partners, that, as of the date of its opinion, and subject to and based on the considerations referred to in its opinion, the total consideration to be provided by Mattson in connection with the Transactions is fair, from a financial point of view, to Mattson's stockholders. The full text of this opinion is attached as Annex D-1 to this joint proxy statement-prospectus. Mattson urges its stockholders to read the opinion of Alliant Partners in its entirety. 7
Opinion of CFM's Financial Advisor. In deciding to approve the merger, the CFM board of directors considered the opinion of its financial advisor, UBS Warburg LLC (formerly known as Warburg Dillon Read LLC), that, as of the date of its opinion, and subject to and based on the considerations referred to in its opinion, the ratio to exchange CFM common stock for Mattson common stock is fair, from a financial point of view, to the holders of CFM common stock. The full text of this opinion is attached as Annex D-2 to this joint proxy statement-prospectus. CFM urges its shareholders to read the opinion of UBS Warburg LLC in its entirety. STOCKHOLDER APPROVALS For Mattson, the affirmative vote of the holders of a majority of the shares present or represented by proxy and entitled to vote at the special meeting, at which a quorum is present and voting, by proxy or in person, is required for approval of the proposed share issuance and the increase in the reserve under the Stock Option Plan needed to complete the Transactions, and for approval of the separate proposals to amend the Stock Option Plan and the Purchase Plan to increase the number of shares reserved for issuance thereunder by 750,000 shares and 250,000 shares, respectively. The affirmative vote of a majority of the outstanding shares of common stock is required for approval of the amendment of Mattson's Certificate of Incorporation to increase the authorized number of shares available for issuance from 60 million shares to 120 million shares. The affirmative vote of at least two-thirds of the outstanding shares of common stock is required for approval of the amendment of Mattson's Certificate of Incorporation to increase the designated number of directors from five to seven and to change the procedure for filling board vacancies. Each holder of common stock is entitled to one vote per share. As of the record date, Mattson directors and officers and their affiliates owned in the aggregate approximately 18.9% of the outstanding shares, and Brad Mattson individually owned approximately 17.7% of the outstanding shares. Pursuant to voting agreements with each of STEAG and CFM, Brad Mattson has agreed to vote all of his shares in favor of the share issuance under the Transactions. For CFM, the affirmative vote of a majority of the votes cast by all shareholders of CFM's common stock is required to adopt the Merger Agreement. No vote shall be taken unless a quorum is present, in person or by proxy. However, if a quorum is not present, those present may vote to adjourn the meeting to such time and place as they may determine, at which time if a quorum is not then present and at least 15 days has passed since the adjournment for lack of a quorum, those present shall constitute a quorum for the purpose of voting upon the CFM proposals set forth herein. CFM common shareholders are entitled to one vote per share. As of the record date, the directors and executive officers of CFM owned in the aggregate approximately 19.7% of the outstanding shares, and Christopher McConnell individually owned approximately 14.0% of the outstanding shares. Pursuant to a voting agreement with Mattson, Christopher McConnell has agreed to vote all of his shares in favor of the adoption of the Merger Agreement. Because STEAG is a privately-held corporation organized under the laws of the Federal Republic of Germany, approval of STEAG's sole shareholder, STEAG AG, is not required in order to effect the business combination. In accordance with German law, both the Supervisory Board (Aufsichtsrat) and the Management Board (Vorstand) of STEAG previously approved the business combination. THE SPECIAL MEETINGS The special meeting of the stockholders of Mattson will be held on , October , 2000, at 10:00 am, local time, at the Newark Hilton, 39900 Balentine Drive, Newark, California 94560. The special meeting of the shareholders of CFM will be held on , October , 2000, at 1:00 pm, local time, at the Sheraton Great Valley Hotel, 707 East Lancaster Avenue, Frazer, Pennsylvania 19355. INTERESTS OF DIRECTORS AND OFFICERS OF MATTSON, STEAG, AND CFM IN THE TRANSACTIONS As of the record date, Brad Mattson, the Chief Executive Officer and current chairman of the board of Mattson, held options to purchase 21,163 shares 8
of CFM common stock exercisable within 60 days. These options were granted in connection with Mr. Mattson's previous service on the board of directors of CFM. These options will become options to purchase Mattson common stock under the terms of the Merger Agreement. Mr. Mattson took no part in the deliberations of the CFM board regarding the proposed merger, and Mr. Mattson resigned from the CFM board effective April 26, 2000. John Savage, a director of Mattson, is also a partner at Alliant Partners, the technology merger and acquisition advisory firm that has provided Mattson with its opinion regarding the fairness of the proposed Transactions to Mattson's stockholders from a financial point of view. Mattson has entered into a Financial Advisory Agreement with Alliant Partners, dated as of May 17, 2000, (the "Alliant Partners Agreement"), providing for Alliant Partners to act as financial advisor in connection with the Transactions. Under the Alliant Partners Agreement, Mattson has agreed to pay Alliant Partners a fee of $300,000 to render an opinion as to the fairness from a financial point of view to Mattson and its stockholders of the consideration to be provided by Mattson in connection with the Transactions. The Alliant Partners Agreement further provides for a "success fee" of $2 million in the event the Transactions close, with the $300,000 fairness opinion fee being applied against such amount. Under the terms of the Alliant Partners Agreement, Mattson has also agreed to reimburse Alliant Partners reasonable expenses, and to indemnify Alliant Partners against any losses, claims, damages, or liabilities to which Alliant Partners may become subject in connection with its use of information that is provided to Alliant Partners by Mattson that is inaccurate in any respect or any other aspect of its rendering such services, unless it is finally judicially determined that such losses, claims, damages, or liabilities relating thereto arose only out of the gross negligence or willful misconduct of Alliant Partners. The Alliant Partners Agreement was determined based on arm's length negotiation and Mattson believes the terms of the Alliant Partners Agreement are no less favorable than could have been obtained from third party consultants and investment bankers. Christopher F. McConnell, the Chairman of the Board of CFM, is party to a Change of Control and Severance Agreement dated as of April 10, 2000 with CFM (the "McConnell Severance Agreement"). In connection with the proposed merger, the Severance Agreement of Roger Carolin dated April 10, 2000 was amended pursuant to Amendment No. 1, Change of Control and Severance Agreement dated as of June 27, 2000 (as amended, the "Carolin Severance Agreement" and collectively the "Severance Agreements"). The Severance Agreements provide, among other things, that following any Change of Control Event (as defined therein), if employment is terminated by the employer Without Cause or by employee for a Good Reason Event (as such terms are defined in the Severance Agreements): any options to purchase common stock of the employer shall vest immediately as of the date of such termination; the employer shall pay the employee his annual target bonus for the then-current fiscal year on a pro rata basis and 24 monthly payments equal to one-twelfth of the employee's then- current annual base salary plus annual target bonus. Lorin J. Randall, the Secretary and Chief Financial Officer of CFM, is a party to an Employment Agreement with CFM dated October 25, 1999 which was amended by Amendment No. 1 dated as of April 10, 2000 (as amended, the "Employment Agreement"). The Employment Agreement provides, among other things, that following any Change of Control Event (as defined therein), if Mr. Randall's employment is terminated (1) by the employer Without Cause (as defined in the Employment Agreement): the employer will pay Mr. Randall twelve monthly payments equal to one-twelfth of Mr. Randall's then current annual base salary plus annual target bonus; his annual target bonus for the current fiscal year on a pro rata basis; monthly compensation equal to one-twelfth of Mr. Randall's then current annual base salary plus annual target bonus for a period of 18 months following the date of termination; and if the change of control occurs within a year following termination, fully vested options to purchase a number of shares of common stock of the employer equal to the number of unvested options held by Mr. Randall and cancelled at the time of termination; or (2) by Mr. Randall upon a Good Reason Event: any options to purchase common stock of the employer and held by Mr. Randall shall 9
vest immediately as of the date of such termination; and the employer will pay Mr. Randall his annual target bonus for the current fiscal year on a pro rata basis. ACCOUNTING TREATMENT Mattson will account for the Transactions as purchases of the STEAG Semiconductor Subsidiaries and CFM by Mattson under the purchase method of accounting. Under purchase accounting, Mattson will record the fair value of the consideration given for the stock of the STEAG Semiconductor Subsidaries, as well as the fair value of the consideration given for the CFM common stock and for options to purchase CFM common stock assumed by Mattson, plus the amount of direct transaction costs, as the cost of acquiring the STEAG Semiconductor Subsidaries and CFM. Mattson will allocate these costs to the individual assets and liabilities of the companies being acquired, including various identifiable intangible assets such as acquired technology, acquired trademarks and trade names and acquired workforce, and to in-process research and development, based on their respective fair values. Intangible assets, including goodwill, will be generally amortized over a three- to seven-year period. REGULATORY APPROVALS Mattson, STEAG, and CFM have already received the required clearances with respect to the Transactions under the Hart-Scott-Rodino Antitrust Improvements Act of 1976 (the "HSR Act") and the German Act Against Restraints on Competition of 1958 (Gesetz gegen Wettbewerbsbeschraenkungen) (the "German Cartel Act"). DISSENTERS' RIGHTS Delaware corporate law, which governs Mattson as a Delaware corporation, does not afford dissenters' or appraisal rights to holders of shares that are quoted on Nasdaq, as are Mattson's shares. In addition, Delaware law does not provide dissenters' or appraisal rights to stockholders of a surviving corporation in a merger if the surviving corporation's stockholders were not required to approve the merger. Mattson's stockholders are not required to approve the Transactions, but rather are required to approve the issuance of shares that are proposed to be issued in connection with the Transactions. Therefore, Mattson stockholders shall have no dissenters' or appraisal rights with respect to the Transactions. Pennsylvania corporate law, which governs CFM as a Pennsylvania corporation, entitles CFM shareholders to dissent from the merger and instead demand payment from CFM of the fair value of their shares. To claim dissenters' rights, a CFM shareholder must deliver to CFM prior to the vote written notice of the shareholder's intent to demand payment for the shareholder's shares if the merger is effected and not vote the shareholder's shares in favor of the merger at the CFM special meeting. CFM will then send the shareholder written notice after the completion of the merger, indicating when and how to demand payment for the shareholder's shares. After receiving the notice, the shareholder must demand payment for the shareholder's shares in the manner required by the notice sent by CFM. The shareholder must also certify to CFM the date shareholder acquired beneficial ownership of the shareholder's shares. If the shareholder does not comply with the requirements outlined above, the shareholder will not be entitled to receive payment for the shareholder's shares under the dissenters' rights provisions of Pennsylvania law and will be entitled to 0.5223 shares of Mattson common stock for each of the shareholder's shares of CFM common stock. If the shareholder complies with the outlined requirements, promptly following the later of the date of effectiveness of the merger or the date CFM received the shareholder's demand for payment, CFM will pay to the shareholder the amount CFM estimates to be the fair value of the shareholder's shares of CFM common stock. Within 30 days of the shareholder's receipt of CFM's remittance or estimate of fair value, if the shareholder believes CFM's estimate of the fair value of the shareholder's shares is incorrect, the shareholder may notify CFM in writing of the shareholder's own estimate of the fair value of the shareholder's shares of CFM common stock and demand payment of the shareholder's estimate. Within 60 days of the later to occur of the effectuation of the merger, timely receipt of the shareholder's demand for payment and timely receipt of an estimate of fair value from the shareholder, if the demand for payment of the shares 10
remains unsettled, CFM may request the fair value be determined by a court. The shareholder's dissenters' rights are set out in their entirety in Sections 1571-1580 of the Pennsylvania Business Corporation Law, which is attached to this joint proxy statement-prospectus as Annex E. 11
RISK FACTORS You should carefully consider the risks described below regarding the Transactions and Mattson's business following the Transactions, together with all of the other information included in or annexed to this joint proxy statement-prospectus, before making a decision about voting on the proposals submitted for your consideration. By voting in favor of the Merger Agreement CFM shareholders will be choosing to exchange their current investment in CFM common stock for an investment in Mattson common stock. By voting in favor of the share issuances and Stock Option Plan share reserve increase in connection with the Transactions, Mattson stockholders will be choosing to permit Mattson to engage in the Transactions, which will affect the risks to Mattson's business. An investment in Mattson common stock involves a high degree of risk. If any of the following risks actually occur, Mattson's business, financial condition, or results of operations could be materially harmed. If Mattson's business is harmed, the trading price of Mattson's common stock could decline, and Mattson stockholders (including former CFM shareholders following the Transactions) may lose all or part of their investment. SPECIAL NOTE REGARDING FORWARD-LOOKING STATEMENTS Some of the information in this joint proxy statement-prospectus and in the documents that are incorporated by reference, including the risk factors in this section, contains forward-looking statements that involve risks and uncertainties. These statements relate to future events or Mattson's future financial performance. In many cases, you can identify forward-looking statements by terminology such as "may," "will," "should," "expects," "plans," "anticipates," "believes," "estimates," "predicts," "potential," or "continue," or the negative of these terms and other comparable terminology. These statements are only predictions. Mattson's actual results could differ materially from those anticipated in these forward-looking statements as a result of a number of factors, including, but not limited to, the risks faced by Mattson following completion of the Transactions described below, elsewhere in this joint proxy statement-prospectus, and in Mattson's periodic filings incorporated herein by reference. Mattson believes it is important to communicate its expectations to investors. However, there may be events in the future that it is not able to predict accurately or over which it has no control. The risk factors listed below, as well as any cautionary language in this joint proxy statement- prospectus, provide examples of risks, uncertainties, and events that may cause Mattson's actual results to differ materially from the expectations it describes in its forward-looking statements. Before making your decision regarding the Transactions, you should be aware that the occurrence of the events described in these risk factors and elsewhere in this joint proxy statement-prospectus could have a material adverse effect on Mattson's business, operating results, and financial condition. RISKS RELATED TO THE TRANSACTIONS The ability of Mattson to integrate successfully the businesses of the STEAG Semiconductor Division and CFM with each other and with its own business is uncertain. After the Transactions, Mattson, the STEAG Semiconductor Division, and CFM, each of which had previously operated independently of each other, will need to integrate their operations. The integration of the three businesses will be complex, time consuming and expensive. The integration will require significant efforts from each company, including the coordination of their research and development and sales and marketing efforts. Mattson may find it difficult to integrate the operations of the STEAG Semiconductor Division and CFM, and vice versa. The combined company will have a large number of employees in widely dispersed operations in California, Germany, Pennsylvania, and other locations, which will increase the difficulty of integrating operations. Current personnel may leave Mattson, the STEAG Semiconductor Division or CFM 12
because of the business combination or the merger. The challenges involved in this integration include, but are not limited to, the following: . Retaining existing customers of each company; . Retaining and integrating management and other key employees of each of Mattson, the STEAG Semiconductor Division, and CFM; . Coordinating research and development activities to enhance introduction of new products and technologies; . Integrating purchasing and procurement operations in multiple locations; . Combining product offerings and product lines effectively and quickly; . Integrating sales and marketing efforts so that customers can understand and do business easily with the combined company; . Coordinating manufacturing operations in a rapid and efficient manner; . Transitioning all world-wide facilities to common accounting and information technology systems; It is not certain that Mattson, the STEAG Semiconductor Division, and CFM can be successfully integrated in a timely manner or at all or that any of the anticipated benefits will be realized. Risks from unsuccessful integration of the companies include: . The impairment of relationships with employees, customers, and suppliers; . The potential disruption of the combined company's ongoing business and distraction of its management; . Delay in introducing new product offerings by the combined company; and . Unanticipated expenses related to integration of the three companies. The combined company may not succeed in addressing these risks. Further, neither Mattson nor CFM can assure you that the growth rate of the combined company will equal the historical growth rates experienced by Mattson, the STEAG Semiconductor Division, or CFM, individually. The Transactions between Mattson, STEAG, and CFM may fail to achieve beneficial synergies. The managements of Mattson, STEAG, and CFM have entered into the Transactions with the expectation that they will result in beneficial synergies between and among the three parties' semiconductor equipment businesses. Achieving these anticipated synergies and the potential benefits underlying their reasons for entering into the Transactions will depend on a number of factors, some of which include: . Mattson's ability to timely develop new products and integrate the products and sales efforts of the combined company; . The risk that the customers of Mattson, the STEAG Semiconductor Division, or CFM may defer purchasing decisions; . The risk that it may be more difficult to retain key management, marketing, and technical personnel after the Transactions; and . Competitive conditions and cyclicality in the semiconductor manufacturing process equipment market. Even if the companies are able to integrate operations, there can be no assurance that the anticipated synergies will be achieved. The failure to achieve such synergies could have a material adverse effect on the business, results of operations, and financial condition of the combined company. 13
The STEAG Semiconductor Subsidiaries and CFM have experienced financial losses and may require significant financial support from Mattson. The STEAG Semiconductor Subsidiaries and CFM have suffered losses from operations in recent periods. After consummation of the Transactions, the acquired businesses may experience further losses that would affect the financial results of Mattson, reduce Mattson earnings per share, and would require funding by Mattson to sustain their operations. If losses continue at historic levels for the STEAG Semiconductor Subsidiaries and CFM, the Transactions may require Mattson to use a significant portion of its cash balances. The ratio for the exchange of CFM shares for Mattson shares is fixed. The ratio of the number of shares of Mattson common stock to be exchanged for each share of CFM common stock will not change. Upon completion of the merger, each share of CFM common stock will be exchanged for 0.5223 shares of Mattson common stock. There will be no adjustment to this exchange ratio for changes in the market price of either Mattson common stock or CFM common stock. In addition, neither Mattson nor CFM may terminate the Merger Agreement or "walk away" from the merger solely because of changes in the market price of either company's common stock. Therefore, if the market value of Mattson common stock or CFM common stock changes relative to the market value of the other, there will be no change, either upward or downward, in the aggregate number of shares of Mattson common stock to be issued to CFM shareholders in the merger. The share prices of Mattson common stock and CFM common stock are by nature subject to the general price fluctuations in the market for publicly traded equity securities, and in particular fluctuations in the market prices of equity securities of semiconductor equipment companies have experienced significant volatility. You should obtain recent market quotations for Mattson common stock and CFM common stock in order to accurately assess the market value of the Mattson shares that will be issued in exchange for the CFM shares. Mattson cannot predict or give any assurances as to the relative market prices of Mattson or CFM common stock before the closing of the merger. The combined company's reported financial results will suffer as a result of purchase accounting treatment and the impact of amortization of goodwill and other intangibles, and restructuring charges relating to the Transactions. Mattson will account for the Transactions as purchases of the STEAG Semiconductor Subsidiaries and CFM by Mattson under the purchase method of accounting. Under purchase accounting, Mattson will record the fair value of the consideration given to STEAG in exchange for the stock of the STEAG Semiconductor Subsidiaries, as well as the fair value of the consideration given in exchange for the outstanding CFM common stock and for the outstanding options to purchase CFM common stock assumed by Mattson, plus the amount of direct transaction costs, as the cost of acquiring the STEAG Semiconductor Subsidiaries and CFM. Mattson will allocate these costs to the individual assets and liabilities of the companies being acquired, including various identifiable intangible assets such as acquired technology, acquired trademarks and trade names and acquired workforce, and to in-process research and development, based on their respective fair values. Intangible assets, including goodwill, will be generally amortized over a three- to seven-year period. As described in the Unaudited Pro Forma Condensed Combined Financial Statements, the amount of purchase cost allocated to goodwill and other intangibles is estimated to be approximately $400 million. Assuming goodwill and other intangible assets were amortized in equal quarterly amounts over 5 years following completion of the Transactions, the accounting charge attributable to these items would be approximately $20 million per quarter or $80 million per fiscal year. As a result, purchase accounting treatment of the Transactions could have a material adverse effect on the market value of Mattson common stock following completion of the Transactions. Mattson may incur restructuring costs in order to achieve desired synergies after the Transactions, which will adversely impact future financial results. These restructure costs could be a result of, but not limited to, the following: . Severance costs associated with possible headcount reductions due to duplication; and . Asset write-offs associated with manufacturing and facility consolidations. 14
Uncertainty related to the Transactions could harm the combined company. In response to the announcement of the Transactions, customers or suppliers of Mattson, the STEAG Semiconductor Division, and CFM may delay or defer product purchase or other decisions. Any delay or deferral in product purchase or other decisions by customers or suppliers could have a material adverse effect on the business of the relevant party, regardless of whether the Transactions are ultimately completed. Similarly, current and prospective Mattson, STEAG Semiconductor Division, and/or CFM employees may experience uncertainty about their future roles with Mattson until the Transactions are completed and Mattson's strategies with regard to the integration of operations of Mattson, the STEAG Semiconductor Division, and CFM are announced or executed. This may adversely affect Mattson's, the STEAG Semiconductor Division's, and/or CFM's ability to attract and retain key management, sales, marketing, and technical personnel. The Transactions could adversely affect combined financial results. Mattson, the STEAG Semiconductor Division, and CFM are expected to incur direct transaction costs of approximately $4.7 million in connection with the Transactions. If the benefits of the Transactions do not exceed the costs associated with the Transactions, including any dilution to Mattson stockholders and CFM shareholders resulting from the issuance of shares in connection with the Transactions, the combined company's financial results, including earnings per share, could be adversely affected. The rights of holders of CFM common stock will be changed as a result of the merger. Following the merger, holders of CFM common stock outstanding on the date of the merger will become holders of Mattson common stock. Certain differences exist between the rights of Mattson stockholders under Mattson's Certificate of Incorporation, Bylaws and the corporate law of Delaware, its state of incorporation and the rights of CFM shareholders under CFM's Articles of Incorporation, Bylaws and the corporate law of Pennsylvania, its state of incorporation. See "Comparison of Rights of Holders of Mattson Common Stock and CFM Common Stock." Certain rights that CFM shareholders currently have under CFM's Articles of Incorporation and bylaws and under Pennsylvania law may cease to exist following the merger. Officers and directors of Mattson and CFM have certain conflicts of interest that may influence them to support or approve the Transactions. Some of the directors and officers of Mattson and CFM participate in arrangements and have continuing indemnification against liabilities that give them interests in the Transactions that are different from the interests of other Mattson stockholders or CFM shareholders interests, including the following: . John Savage, a director of Mattson, is also a partner at Alliant Partners, the technology merger and acquisition advisory firm that provided Mattson with its opinion regarding the fairness of the proposed Transactions, from a financial point of view, to Mattson's stockholders. Mattson has paid Alliant Partners a fee of $300,000 for rendering an opinion as to the fairness from a financial point of view to Mattson's stockholders of the consideration to be provided by Mattson in connection with the Transactions. Mattson has agreed to pay Alliant Partners a success fee of $2,000,000 in the event the Transactions close, against which the fairness opinion fee will be credited. . Brad Mattson was formerly a member of the board of directors of CFM. As of the record date, Brad Mattson held options to purchase 21,163 shares of CFM common stock exercisable within 60 days. These options will become options to purchase Mattson common stock under the terms of the Merger Agreement. . Some officers of CFM will be entitled to severance payments and additional accelerated vesting of options if they are terminated or constructively terminated by Mattson after completion of the merger. . Mattson and CFM have agreed that Mr. James Kim will be designated by CFM to serve on Mattson's board of directors upon completion of the Transactions. For the above reasons, the directors and officers of Mattson and CFM could be more likely to vote to approve the terms of the Transactions than if they did not have these interests. Mattson stockholders and CFM 15
shareholders should consider whether these interests may have influenced these directors and officers to support or recommend the Transactions. Failure to complete the Transactions could have a negative impact on Mattson's and/or CFM's stock price, future business and operations, or financial results. If the Transactions are not completed for any reason, Mattson and CFM may be subject to a number of material risks, including the following: . Depending on the reasons for termination, Mattson may be required to pay CFM, or CFM may be required to pay Mattson, a termination fee of $7,110,000; . Depending on the reasons for termination, Mattson may be required to pay STEAG either a termination fee of $20,000,000, STEAG's fees and expenses in connection with the Combination Agreement up to $5,000,000, or one- half of a $40,000,000 lump sum payment which may be required to be made by STEAG to CFM under the Interim Patent License Agreement dated June 28, 2000 between CFM, CFMT, Inc., and STEAG; . The price of Mattson and/or CFM common stock may decline to the extent that the relevant current market price reflects a market assumption that the Transactions will be completed; . Some costs related to the Transactions, such as legal, accounting, financial advisor, and financial printing fees, must be paid even if the Transactions are not completed; and . There may be substantial disruption to the businesses of Mattson and CFM and distraction of their workforces and management teams. The Transactions may be challenged by regulatory authorities. Mattson, STEAG, and CFM have obtained regulatory clearance under both the HSR Act and the German Cartel Act with respect to the Transactions. However, even though these regulatory clearances have been obtained, any federal, state, or foreign governmental agency or private person may still challenge the Transactions at any time before, or even after, their completion. STEAG may terminate the business combination, and therefore the Transactions, if Mattson's common stock is trading at less than $15.78 at the time of closing. As set forth in the Combination Agreement, STEAG may terminate the Combination Agreement if the 20- trading-day average closing price of Mattson's common stock measured two business days prior to the proposed closing of the business combination is below $15.78 per share. In addition, STEAG may terminate the Combination Agreement if the 20 trading day average closing price of Mattson's common stock measured two business days prior to the proposed closing of the business combination is below $20.00 per share, unless Mattson elects to pay, in the form of a 3-year promissory note, the product obtained by multiplying 11,850,000 by the difference between $20.00 and such 20-trading-day average common stock closing price. See "The Strategic Business Combination Agreement--Termination." Because the Transactions are mutually conditioned on each other, in the event the Combination Agreement is terminated, the Merger Agreement will automatically be terminated as well. 16
RISKS RELATING TO MATTSON'S BUSINESS FOLLOWING CONSUMMATION OF THE TRANSACTIONS In addition to the risk factors set forth above with respect to the Transactions, following the consummation of the Transactions, Mattson's combined business will be subject to risk factors including the following: The combined companies' sales have reflected the cyclicality of the semiconductor industry. Such continued cyclicality following the consummation of the Transactions may cause Mattson's operating results to fluctuate significantly and could cause Mattson to fail to achieve anticipated sales. The business of each of Mattson, the STEAG Semiconductor Division, and CFM has depended in significant part upon capital expenditures by manufacturers of semiconductor devices, including manufacturers that are opening new or expanding existing fabrication facilities. Mattson will continue to depend on these factors after the consummation of the Transactions. The level of capital expenditures by these manufacturers of semiconductor devices depends upon the current and anticipated market demand for such devices and the products utilizing such devices. The semiconductor industry is highly cyclical. The industry has in the past, and will likely in the future, experience periods of oversupply that result in significantly reduced demand for capital equipment, including Mattson's systems in each of the post-combination product lines. When these periods occur, Mattson's operating results and financial condition may be adversely affected. Mattson anticipates that a significant portion of new orders will continue to depend upon demand from semiconductor manufacturers and independent foundries that build or expand large fabrication facilities. If existing fabrication facilities are not expanded or new facilities are not built, demand for Mattson's systems may not develop or increase, and Mattson may be unable to generate significant new orders for Mattson's systems. If Mattson is unable to develop new orders for Mattson's systems, Mattson will not achieve anticipated net sales levels. Any future downturns or slowdowns in the semiconductor industry will materially and adversely affect Mattson's net sales and operating results. Following the Transactions, Mattson will be a larger, more geographically diverse company and may be less able to react quickly to the cyclicality of the semiconductor business, particularly in Europe and in other regions with restrictive laws relating to termination of employees. Most of Mattson's revenue will come from a small number of large sales, and any delay in the timing of individual sales could cause Mattson's operating results to fluctuate from quarter to quarter. A delay in a shipment near the end of a quarter may cause net sales in that quarter to fall below Mattson's expectations and the expectations of market analysts or investors. Currently, each of Mattson, the STEAG Semiconductor Division, and CFM derives most of its revenues from the sale of a relatively small number of expensive systems and Mattson will continue to depend on a small number of sales after the consummation of the Transactions. The list prices on these systems range from $500,000 to over $4 million. Following the Transactions, each sale, or failure to make a sale, could have a material effect on Mattson. Mattson's lengthy sales cycle for each of its systems, coupled with customers' competing capital budget considerations, make the timing of customer orders uneven and difficult to predict. In addition, Mattson's backlog at the beginning of a quarter is not expected to include all orders required to achieve Mattson's sales objectives for that quarter. As a result, Mattson's net sales and operating results for a quarter depend on Mattson's shipping orders as scheduled during that quarter as well as obtaining new orders for systems to be shipped in that same quarter. Any delay in scheduled shipments or in shipments from new orders would materially adversely affect Mattson's operating results for that quarter, which could cause Mattson's stock price to decline. In the past, Mattson has experienced cancellation of orders, and there can be no assurance that further order cancellations or reductions in order growth or the level of overall orders for semiconductor capital equipment will not have a further material adverse effect upon Mattson's business or results of operations. The need for continued investment in research, development and engineering, marketing, and customer satisfaction activities may limit Mattson's ability to reduce expenses in response to continued or future downturns in the semiconductor industry. Mattson's net sales and results of operations could be materially adversely affected if other downturns or slowdowns in the semiconductor markets occur in the future. 17
Mattson's quarterly financial results fluctuate significantly and may fall