MATTSON TECHNOLOGY TO DIVEST RT-CVD UNIT

FREMONT, Calif. -February 21, 2001- Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that the company plans to divest its single-wafer RT-CVD business unit, previously known as STEAG CVD Systems. The business unit, which was acquired as part of the merger with STEAG, included lamp-based RT-CVD tools that were not a fit with Mattson's strategic roadmap for thermal and CVD products. Mattson Technology's decision to sell the business unit is a result of the company's strategy to focus on its core technologies and providing its customers with high productivity tools based upon the best performing platforms and processes available.

The advanced technology and product scope of the RT-CVD business, however, will most likely offer a better strategic fit and create greater significant value in a different product portfolio. The company, therefore, is currently in discussions with potential buyers for the business unit and has retained Alliant Partners to manage the legal proceedings of the sale. John Savage and Jevan Anderson of Alliant Partners can be contacted for questions and further information related to the divestiture at:

Alliant Partners
435 Tasso Street
Palo Alto, CA 94301
Tel : 1-650-614-1533
Fax : 1-650-325-0460
Email: jsavage@alliant.com

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.