MATTSON TECHNOLOGY RECEIVES $50 MILLION IN ORDERS FROM MAJOR EUROPEAN-BASED SEMICONDUCTOR MANUFACTURER

Combined 300 mm Orders Reflects Confidence in Newly Integrated Company

FREMONT, Calif. -March 19, 2001- Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has received several orders from a major European-based semiconductor manufacturer for multiple 300 mm RTP, CVD, strip and wet processing equipment. The combined value of the orders, the first of which was received in September 2000, exceeds $50 million. The 300 mm orders demonstrate the customer's confidence in Mattson Technology and its ability to meet aggressive 300 mm program goals. The equipment has begun shipping to the customer's facilities around the world and is scheduled to continue shipping through 2002. The orders confirm Mattson's leadership position in multiple markets and extends that lead into the 300 mm arena. "Penetrating another top 10 chipmakers is a major accomplishment. It demonstrates that our 300 mm strip, RTP and wet processing systems have clear product differentiation and that our 300 mm CVD offering can unseat well-established market players," stated Brad Mattson, Mattson Technology's CEO. "We look forward to working closely with this customer to provide a competitive advantage in the quickly emerging 300 mm processing era."

As part of the customer's 300 mm initiative, all of its 300 mm facilities will install equipment from Mattson Technology's three technology divisions - Thermal, Plasma and Wet Divisions. The ordered equipment breakdown is as follows:

o Aspen III Strip systems

o Aspen III CVD systems

o AWP 300 wet processing systems

o 3000 RTP systems

The orders, spanning all of Mattson Technology's divisions, reflect not only the performance of the company's 300 mm technologies but also the strong impact the newly merged company will have on the semiconductor equipment market. Mattson continued, "These orders are tangible proof that the industry understands the advantages the new, larger Mattson Technology now offers in front-end processing, especially in 300 mm."

This Press Release contains forward-looking statements regarding, among other matters, the Company's future financial performance. Forward looking statements address matters which are subject to a number of risks and uncertainties. In addition to the general risks associated with the development of complex technology, future results of the Company will depend on a variety of factors, including the timing of significant orders, the ability of the Company to bring new systems to market, the timing of new product releases by the Company's competitors, slowdowns in the semiconductor industry, other competitive factors, satisfaction of conditions to pending acquisition and risks of integration. Reference is made to the Company's filings with the Securities and Exchange Commission for further discussion of risks and uncertainties regarding the Company's business.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.