MATTSON TECHNOLOGY IMPLEMENTS COST REDUCTION PROGRAM

Program to Reduce Operating Expenses by 20 Percent

FREMONT, Calif. - May 4, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used in the manufacture of semiconductors, today announced that due to the semiconductor industry slowdown it will implement a global cost reduction program, targeting a 20 percent overall expense reduction for fiscal 2001.

Included in the cost cutting program will be a reduction in workforce, 10 percent pay cut for company executives, several facilities consolidations and plant shutdowns during the summer. The reduction in force is effective May 3, and impacts employees at several Mattson Technology locations. Approximately 15 percent of the company's U.S. employees will be affected by the work force reduction and facilities consolidation. Cost reducing efforts will continue throughout Mattson's global operations for the duration of the industry downturn.

According to Mattson Technology CEO Brad Mattson, "This downturn came about very quickly, leaving no equipment supplier immune. Instead of just cutting headcount, we decided to execute an overall cost reduction program, which will help us strategically maintain our infrastructure to meet the demands of the inevitable industry upturn."

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.