MATTSON TECHNOLOGY RECEIVES MAJOR ORDER FROM SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.

Shanghai Foundry to Leverage Mattson Technology Wet Processing Expertise

FREMONT, Calif. - July 16, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has received a major order from Shanghai-based silicon foundry company Semiconductor Manufacturing International Corp. (SMIC) for several AWP200 wet benches. The multimillion-dollar order represents SMIC's commitment to leverage Mattson Technology's wet processing expertise to meet aggressive production goals. Mattson Technology will install the AWP wet benches at SMIC's Fab 1 located in the Pudong New Area Hi-Tech Industrial Park. Shipments of the wet benches are expected to begin later this year.

SMIC President and CEO Dr. Richard Chang said, "Industry leadership in system performance and support continue to be significant considerations for us in selecting equipment for Fab 1. Our familiarity with Mattson, their global support and leadership in several product lines gave us the confidence to chose Mattson for one of the more critical steps in wafer processing - wet processing." Dr. Chang continued, "SMIC's plans for expansion requires strong partners in every facet of wafer processing. We see that type of relationship with Mattson Technology."

SMIC, led by Taiwan silicon foundry veteran Dr. Richard Chang, is expected to process more than 45,000 200 mm wafers per month at its Fab 1 facility. Initially, SMIC plans to produce chips with design rules of 0.35- to 0.25-micron. In addition, SMIC is currently building Fab 2 and intends to build two more fabs in the Pudong Industrial Park. When fully developed, the Shanghai government estimates that the Pudong New Area Hi-Tech Industrial Park will contain 15 semiconductor fabs.

Mattson Technology CEO Brad Mattson commented that this order is a significant regional win for the company because China is expected to be one of the fastest growing semiconductor producing regions. "China represents a largely untapped semiconductor manufacturing market and Mattson Technology continues to make inroads in the region," said Mattson. "SMIC chose our AWP wet benches for their superior performance, ease of use and throughput - critical factors in ramping up a new fab. We look forward to strengthening our relationship with SMIC ."

Mattson Technology's AWP wet processing systems are designed for a variety of critical cleaning and wafer surface preparation steps on the most advanced semiconductor devices. The AWP product line offers significant process flexibility and excellent process performance at a low CoO. To better meet chipmakers' changing needs, the systems are available in several process configurations.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.