MATTSON TECHNOLOGY ANNOUNCES CORRECTION TO TIME OF SECOND QUARTER 2001 CONFERENCE CALL

FREMONT, Calif. - August 13, 2001 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced a correction to the time it will hold its second quarter earnings conference call. The call will be held at 3:00 pm Pacific time on Tuesday, August 14, 2001. A webcast of the live conference call will be available starting at 3:00 pm Pacific time on Tuesday, August 14, 2001 on Mattson's website under the "Investor Line" section.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.