MATTSON TECHNOLOGY RESCHEDULES FOURTH QUARTER AND YEAR END 2001 EARNINGS CONFERENCE CALL

FREMONT, Calif. - February 25, 2002 - Mattson Technology (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has rescheduled its fourth quarter and year-end earnings release and conference call, originally set for 2:00 pm Pacific time on Monday, February 25, to the same time on Thursday, February 28, 2002.

The rescheduling is needed to provide additional time for completion of the accounting for year-end financial results, which include the acquisition of CFM Technologies, Inc. and the semiconductor equipment division of STEAG Electronics Systems AG. "The year end accounting, including a final determination of the allocation of the purchase price for the two acquisitions, requires more time than previously anticipated," said Ludger H. Viefhues, Mattson's chief financial officer.

After releasing earnings following the close of the market day, Mattson will hold a conference call for investors and other interested members of the public at 2:00 pm Pacific time on Thursday, February 28, 2002. An audio webcast of the live conference call will be available on Mattson's home page at www.mattson.com under the "Investor Line" section. A replay of the call will also be available on Mattson's website for one week following the live broadcast.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.