FREMONT, CA. March 5, 2002 - Mattson Technology, Inc. (Nasdaq: MTSN), announced today that a jury in San Jose, California rendered a verdict in a patent infringement suit in favor of CFM Technologies, Inc., which was acquired by Mattson Technology last year. The verdict against Dainippon Screen Manufacturing Co., Ltd. (DNS), a large Japanese manufacturer of semiconductor wafer processing equipment, came after nearly five years of litigation capped by a four-week jury trial.

In the lawsuit, CFM claimed that six different DNS wet processing systems infringed two of CFM's patents on drying technology. DNS denied that its machines infringed and alleged that the CFM patents were invalid. In the verdict rendered today, the jury found that each of the six DNS machines infringed both of the CFM patents and that both patents were valid.

David J. Ferran, president of Mattson's Wet Processing Division, said, "We are very gratified by the jury's verdict. We have watched DNS take market share while using technology that we believed was covered by our patents. Drying technology is a critical element in the wet processing of semiconductor wafers, and we are committed to protecting the intellectual property created by our significant investment in research and development."

Mattson Technology will seek damages for DNS' past infringements and will request an immediate injunction against any future shipments by DNS of infringing products into the United States market.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.