FREMONT, Calif.- August 19, 2002 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced the opening of its China operations in Shanghai. The new Shanghai facility expands the company’s support infrastructure in Asia and will provide customers direct access to Mattson’s world-class product and service solutions in China, currently the world’s fastest growing semiconductor foundry and chip consumption market.

“With a growing number of wafer fabs, China is quickly becoming a regional leader and a driving force in the global semiconductor industry, and Mattson has strategically positioned our new office in Shanghai to serve this burgeoning market,” said David L. Dutton, president and chief executive officer of Mattson Technology. “The opening of the facility strengthens our leadership position in the Asia-Pacific region and demonstrates Mattson’s ongoing commitment to working with our customers to build the infrastructure critical to China’s growth.”

The Jin Qiao, Pudong facility, located approximately two miles (four kilometers) from Zhang Jiang Science Park where China’s major fabs are situated, will be used to provide 24/7 technical support services, product training, equipment and applications expertise and spare parts logistics. The facility will also serve as Mattson’s central administration, sales and marketing office in China.

“Establishing this facility in Shanghai brings Mattson closer to our customers in China, where we already have a large installed base, and allows us to meet their needs in the fastest and most efficient way,” said Mike Morita, executive vice president of Global Business Operations for Mattson Technology. “With links to Mattson offices in the Asia-Pacific region, the new facility will expand our capability to provide industry-leading technology solutions and enhanced system service and support to our customers in China.”

Mattson Technology has long held a leadership position in the Asia-Pacific region, with a strong local presence in Taiwan, Japan, Korea and Singapore. Mattson’s new sales and service facility in China builds on this leadership, expanding the company’s global infrastructure while strengthening its ability to support China’s emerging semiconductor market

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.