Mattson Technology's Advanced RTP Systems Installed at Varian Semiconductor to Develop Integrated Process Solutions

FREMONT, Calif.- - September 30, 2002 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, and Varian Semiconductor Equipment Associates, Inc. (NASDAQ: VSEA), the leading supplier of ion implantation systems, today announced the installation of Mattson's 3000 Plus advanced thermal processing system at Varian Semiconductor's Gloucester, Massachusetts facility. The companies will use the 3000 Plus to perform ultra-shallow junction formation process development as part of a joint development program.

Mattson Technology and Varian Semiconductor will utilize the 3000 Plus' advanced processing capabilities and VSEA's market-leading ion implant capabilities to develop transistor formation technologies for 65 nm and smaller device structures. The companies will first focus their efforts on ultra-shallow junction formation. This will be followed by additional activities aimed at furthering the integration of front-end-of-line transistor fabrication processing.

"The semiconductor industry's drive toward sub-90 nm devices requires an increased focus on future process development," said David L. Dutton, president and chief executive officer of Mattson Technology. "Our ongoing commitment to providing leading process technology and complete integrated solutions led to this joint development program. Mattson Technology's thermal processing expertise, coupled with Varian Semiconductor's ion implantation leadership, will extend our collective capabilities to bring optimized, deep-submicron integrated transistor formation processes to the marketplace."

"We are pleased to extend our relationship with Mattson Technology to this new cooperative development activity," said Richard Aurelio, chairman and chief executive officer of Varian Semiconductor. "The combined expertise of our two companies should enable the successful integration of these processes. Through this program, we will accelerate our rate of learning, hasten the transfer to volume production and enhance our ability to offer advanced transistor formation technologies."

Varian Semiconductor and Mattson Technology Safe Harbor Statement

This release contains forward-looking statements for purposes of the safe harbor provisions under The Private Securities Litigation Reform Act of 1995. For this purpose, statements concerning Varian Semiconductor Equipment Associates' and Mattson Technology's ("the companies") expectations regarding the joint development program discussed in this release, operating outlooks, market shares and technology leadership are forward-looking statements and any statements using the terms "believes," "anticipates," "expects," "plans" or similar expressions are forward-looking statements. There are a number of important factors that could cause actual events to differ materially from those suggested or indicated by such forward-looking statements. These include, among others, the possible failure of the companies to realize the anticipated benefits of the alliance, incompatibility of future-generation technology developments with current technology, inability of the companies to support new sub-130 nm technology, volatility in the semiconductor equipment industry, economic conditions in general and as they affect the companies' customers, the impact of rapid technological change, concentration in the companies' customer bases and length of sales cycles, the highly competitive markets in which the companies compete, risks of international sales, foreign currency risks, general economic conditions and other factors identified in the companies' Annual Reports on Form 10-K, and the most recent Quarterly Reports on Form 10-Q filed with the Securities and Exchange Commission. The companies cannot guarantee any future results, levels of activity, performance or achievement. The companies undertake no obligation to update any of the forward-looking statements after the date of this press release.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.