Order Furthers Mattson's Expansion Into China Market

FREMONT, Calif.- October 14, 2002 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a new semiconductor foundry in Shanghai, China has ordered multiple Aspen II Strip systems for volume chip production in its Fab 1. The Aspen strip systems are scheduled to ship in the fourth quarter, 2002.

"Success in the foundry business requires a combination of economic operation, high productivity and flexibility in running multiple process technologies," said Randy Matsuda, vice president and general manager of the Films and Etch product group at Mattson Technology. "The Aspen II Strip system's production-proven reliability, high productivity performance and low cost of ownership benefits were critical factors in our customer's decision. The order from this new customer extends Mattson Technology's market share leadership in photoresist ash and strip and establishes our long-term commitment to support China's continuing integrated circuit manufacturing requirements. We recently expanded our service infrastructure, with the opening of our Shanghai office, to provide extended support to customers in this rapidly developing region."

About the Aspen II Strip

The Aspen II Strip system features Mattson Technology's proprietary inductively coupled plasma (ICP) source for advanced sub-micron applications that require ultra-low contamination levels. The system combines ultra-low damage and minimal contamination drive-in with high throughput and effectively strips resist and residue, reducing the need for post-strip chemical processing. The Aspen II Strip system offers the most advanced technology on a high productivity platform, providing chipmakers the process performance they require for advanced device manufacturing at the low cost of ownership they need to compete in today's market.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.