Former KLA-Tencor Executive Bill Turner Joins Board of Directors

FREMONT, Calif.- November 21, 2002 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that Brad Mattson, who founded the company in 1988, has retired from his position as vice chairman and as a member of the Board of Directors to pursue personal interests. The company also announced the appointment of Bill Turner, 46, to its Board of Directors. Turner will fill the vacancy created by the retirement of Brad Mattson.

"This is the next logical step in my planned retirement, and this change affords me the opportunity to devote more time to my family and other interests," said Mattson. "I have had a long and productive tenure at Mattson Technology, both as a Board member and as an executive officer, and I am proud to have played a key role in the company's inception, growth and success. I retire from my position as vice chairman with full confidence in the company's current Board and management team and Mattson Technology's future."

"Brad Mattson is a true visionary and a recognized leader in the semiconductor industry, having founded two successful public companies," said Dr. Jochen Melchior, chairman of Mattson Technology. "Brad's commitment and dedication to building the company during the 14 years he served as its chief executive officer established Mattson Technology as one of the industry's leading semiconductor equipment suppliers. On behalf of Mattson Technology, I would like to thank Brad for his contributions to the company and wish him well on his new endeavors."

Commenting on the change in board composition, Melchior said, "We are pleased to welcome Bill Turner to our Board of Directors. Bill's semiconductor industry experience and his extensive financial and business expertise will make him a valuable addition to the Board."

Turner's career spanned more than 13 years at KLA-Tencor, where he held positions of increasing responsibility in the finance function, most recently serving as vice president of finance. Turner earned his undergraduate degree in economics from Princeton University and holds an MBA from Stanford University. In recent years, he has been active as a general partner in a private venture capital firm.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.