The transaction involves the transfer of certain subsidiaries, assets and intellectual property related to the Wet Products Division. As part of the transaction, Mattson Technology will retain the rights to all future royalty and settlement payments under previously announced agreements with Dainippon Screen Manufacturing Co., Ltd. The transfer of the Wet Products Division will result in a one time restructuring charge for Mattson.

“The divestiture of our Wet Products Division is a key component in the strategy we adopted in 2002 to focus on driving core technologies to market leadership, “ said David L. Dutton, chief executive officer of Mattson Technology. “This transaction reinforces our strategic focus on extending our leadership in next-generation RTP and strip solutions and strengthens SCP’s position in the wet clean market. The transfer of our wet operations to SCP will also help to ensure that our customers continue to benefit from our established wet technology. This is clearly a win-win for all parties.”

In connection with this transaction, Mattson Technology and SCP are in discussions to form a strategic alliance to develop integrated cleaning technologies for transistor formation, post-etch and implant process wafer cleaning and pre-thermal wafer process cleaning. The combined expertise of the two companies will strengthen their collective capabilities to provide integrated wet cleaning and “dry” process technologies that will enable customers to maximize their process performance results. Under the alliance, Mattson and SCP will cross license intellectual property, which they believe will significantly increase each of their development efficiencies and enable them to optimize the value and “time to market” of projects they jointly develop.

“Our planned strategic alliance with SCP is an extension of our long-term objective to provide customers with leading process technology and critical integrated solutions,” said Dutton. “We are strongly committed to working with our strategic partner to ensure the success of the joint development and maximize the value to all of our stakeholders.”

"The combination of our resources and Mattson Technology’s established wet technology will create a very strong number two provider in the wet cleaning equipment market,” said Mark Peterson, chief executive officer and president of SCP. "We are working with strategic investment partners to ensure that this new business has the appropriate financial backing to strengthen our leadership position in the wet processing arena. SCP’s and Mattson's commitment to customers is paramount in this deal, and we are working together to provide a seamless transition to help ensure that our customers receive continued availability of systems, support and spares.”

This press release contains forward-looking statements regarding, among other matters, the Company's future development efforts. Forward looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially. In addition to the general risks associated with the slowdown in the semiconductor industry and development of complex technology, our future results will depend on a variety of factors, including the timing of significant orders, our ability to timely manufacture and deliver ordered products, our ability to bring new systems to market, the timing of new product releases by our competitors, our ability to reduce cost in response to market conditions, and other competitive factors. Reference is made to the Company's filings with the Securities and Exchange Commission for further discussion of risks and uncertainties regarding the Company's business. The Company assumes no obligation to update the information in this press release.

About SCP Global Technologies

For over 25 years, SCP Global Technologies has been an industry leader in the development of wet processing equipment used in the manufacture of semiconductor wafers. The company continues its commitment to being the worldwide leader in the supply of cost-effective surface preparation technology, systems and services to the semiconductor and related industries. For further information regarding SCP, access the company’s web site at www.scpglobal.com. www.scpglobal.com

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.