 |
News
|
|
|
|
Press
Releases - 2003 |
INTERNATIONAL
SEMATECH SELECTS MATTSON TECHNOLOGY’S 3000 PLUS RTP SYSTEM
FOR ATDF PRODUCTION LINE
FREMONT, Calif. — July 14, 2003 — Mattson Technology,
Inc. (NASDAQ: MTSN), a leading supplier of advanced process
equipment used to manufacture semiconductors, today announced
it has received an order from International SEMATECH for
its 3000 Plus RTP system. The system is scheduled to ship
by the end of the third quarter of 2003 and will be used
for baseline control processes and in the testing of the
thermal stability of high-k material systems in SEMATECH’s
Advanced Tool Development Facility (ATDF) production line
in Austin, TX.
“Advanced RTP processes are necessary for 90 nm ITRS
node processing and beyond. Fast-ramp capability and temperature
control will be critical to our successful demonstration
of novel high-k, metal gate and non-classical CMOS unit processes
to our member companies,” said Larry Larson, associate
director of International SEMATECH’s Front-End Processes
Division.
“International SEMATECH’s selection of the 3000
Plus reflects the importance of RTP technology, particularly
for ultra-shallow junction formation and advanced anneal
applications,”said Douglas K. Walker, director of North
American operations of Mattson Technology. “We have
worked with SEMATECH on ultra-shallow formation and gate
stack programs over the past several years and are pleased
to have the opportunity to extend our collaborative efforts
in the development of additional RTP applications.”
About
the 3000 Plus
The 3000 Plus is Mattson Technology’s latest 300 mm
RTP tool designed for production of sub-90 nm generation
devices. The 3000 Plus offers fast ramp capability and extension
of the temperature measurement and control range down to
lower temperatures, allowing it to address the most stringent
processing requirements. The system’s applications
suite ranges from state-of-the-art cobalt silicide anneals
to the most demanding flash anneal processes for ultra-shallow
junction formation.
About International SEMATECH
International SEMATECH (ISMT) is a global semiconductor technology
development consortium that has effectively represented the
semiconductor manufacturing industry on innovation issues
since 1988; its members are AMD, Hewlett-Packard, IBM, Infineon,
Intel, Motorola, Philips, Texas Instruments and TSMC. ISMT
conducts state-of-the-art research, and is a highly-regarded
technology partner whose mission is to promote the interests
common to all chipmakers. It has extensive experience collaborating
with equipment and materials suppliers, as well as government
and academic research centers, to refine the tools and technology
necessary to produce future generations of chips. Additional
information may be found at www.sematech.org.
About Mattson Technology, Inc.
Mattson Technology,
Inc. is a leading supplier of semiconductor wafer processing
equipment used in "front-end" fabrication
of integrated circuits. The company is a market leader in
dry strip and RTP equipment, and its products combine advanced
process technology on high-productivity platforms backed
by industry-leading support. Since beginning operations in
1989, the company’s core vision has been to help bring
technology leadership and productivity gains to semiconductor
manufacturers worldwide. Headquartered in Fremont, Calif.,
the company maintains sales and support centers throughout
the United States, Europe and Asia. For more information,
please contact Mattson Technology, Inc., 47131 Bayside Parkway,
Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900.
Fax: (510) 492-5911. Internet: www.mattson.com.
|
|