“Mattson Technology strives to deliver industry-leading quality products and services,” said Robert B. MacKnight, chief operating officer of Mattson Technology. “The attainment of ISO 9001:2000 is the culmination of our progress in the previous ISO standard and represents our ongoing commitment to customer satisfaction and to delivering excellence in all areas of operation. The principles of ISO 9001 have helped us to improve our business processes and support our mission to be the leading provider of innovative process solutions for our customers.”

“The certification process has helped us to refine our documentation and procedures and is an important milestone in our quality efforts,” said Michael W. Scanlon, director of Corporate Quality at Mattson Technology. “We are extremely pleased to have achieved this certification and plan to build upon the ISO standard through the continuous improvement of our quality systems.”

ISO 9001:2000 inspection is an exhaustive and stringent process that evaluates key elements across all disciplines of a company’s entire business system—from product design and development, installation and servicing to measuring customer satisfaction. ISO certification is attained when an independent audit firm's assessment verifies that an organization's day-to-day business practices meet or exceeds its process documentation. The Mattson Technology assessment was conducted by TUV Rheinland of North America, Inc. The TUV Rheinland assessment verified the approach, deployment and results of Mattson Technology’s quality management system.

Stephan Schmitt, CEO and President of TUV Rheinland of North America, Inc., said, “Mattson Technology is a company that has consistently and continuously worked to improve the quality of its products and quality systems. The global ISO 9001:2000 certification identifies Mattson as one of a select group of semiconductor equipment companies that has achieved compliance to the standard at all of the company’s sites. We are very pleased that TUV Rheinland of North America, Inc. was chosen by Mattson Technology as its corporate ISO 9000 registrar.”

About TUV Rheinland of North America, Inc.

TUV Rheinland of North America, Inc., a subsidiary of TÜV Rheinland Berlin Brandenburg Group, is a global leader in compliance engineering, testing and certification. With over 7,500 employees worldwide and locations in over 40 countries, TÜV Rheinland offers testing and certification of technical equipment and products and is also an officially recognized QS-9000/ISO 9000 Quality Registrar and provides ISO 14001 and TL 9000 services. For more information, please contact TUV Rheinland of North America, Inc., 12 Commerce Road, Newtown, CT, 06470. Telephone: (Toll Free) 1-TUV-411-0042. Fax: (203) 426-4009. Internet: www.us.tuv.com.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.