MATTSON TECHNOLOGY TO PRESENT AT JPMORGAN SMALL CAP CONFERENCE

FREMONT, Calif.- March 8, 2004 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that David L. Dutton, president and chief executive officer, and Ludger H. Viefhues, chief financial officer, will be presenting at the JPMorgan Small Cap Conference on Thursday, March 11, 2004 at 4:00 p.m. MST. This year’s conference will be held March 11-12 at the Hyatt Regency in Denver, Colorado.

The presentation will be webcast live via the Internet, accessible on Mattson’s corporate website at www.mattson.com or https://events.jpmorgan.com/smallcap04. In addition to the live webcast, a replay will be available to the public on the Mattson website for one week following the live broadcast.

About Mattson Technology, Inc.

Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in the fabrication of integrated circuits. The company’s dry strip and RTP equipment utilize innovative technology to deliver advanced processing capabilities on high-productivity platforms for the fabrication of current- and next-generation devices. Since beginning operations in 1989, the company’s core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.