MATTSON TECHNOLOGY ADVANCED STRIP AND RTP SYSTEMS INSTALLED AT MAJOR TAIWANESE MANUFACTURERS

FREMONT, Calif. — September 07, 2005 — Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that two major Taiwanese manufacturers, a foundry and a DRAM chipmaker, have again selected its 300 mm strip and RTP technologies for advanced chip production. Multiple Aspen III Highlands strip tools were installed in two of the foundry’s 300 mm fabs for low-k/copper processing, and the Helios RTP system is being used for advanced transistor applications to support the expansion of the DRAM chipmaker’s 300 mm fab.

“Our Aspen III Highlands and Helios systems’ proven reliability, superior process control and low cost-of-ownership have made them attractive to foundries, as well as DRAM and logic fabs,” said Randy Y. Matsuda, Mattson Technology’s Global Business Operations vice president & general manager, Asia. “These latest follow-on orders reflect the strength of our presence in Taiwan and demonstrate that leading semiconductor manufacturers value the advanced technological capabilities, processing flexibility and high productivity advantages of our 300 mm tools.”

Featuring Mattson's proprietary inductively coupled plasma (ICP) source technology, the Aspen III Highlands is an advanced strip system used for removing resist, residue and barrier layer for low-k/copper applications.

The Helios addresses the most demanding RTP applications, including nickel silicide formation and ultra-shallow junction spike anneals, enabled by an advanced model-based temperature control for high productivity, excellent processing performance and superior cost-of-ownership.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.