LEADING EUROPEAN DRAM MANUFACTURER SELECTS MATTSON’S RECENTLY RELEASED EHIGHLANDS FOR SUB-90 NM LOW-K APPLICATIONS

FREMONT, Calif. — September 27, 2005 — Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has shipped the Aspen III eHighlands to a leading European DRAM manufacturer. Mattson has been working with this chipmaker to qualify the eHighlands for back-end-of-line (BEOL) low-k strip and front-end-of-line (FEOL) oxide-removal applications for the production of advanced sub-90 nm DRAM devices. The sale complements the suite of 200 and 300 mm Mattson systems already installed at this chipmaker’s facilities around the world.

“After competitive head-to-head evaluations, this leading DRAM manufacturer selected the Aspen III eHighlands as the tool of record for its 300 mm fab, validating the technical strength, processing flexibility and extendibility of our high-productivity tool for the most challenging BEOL copper/low-k and FEOL strip applications,” said Stephen T. Lanza, Mattson Technology’s Global Business Operations vice president & general manager, Europe and North America. “We plan to strengthen our strip dominance by continuing to deliver reliable, cost-efficient advanced technologies, backed by our strong local on-site support, that our long-standing customer has relied on for over the last ten years.”

The latest addition to Mattson’s complete family of dry strip products, the Aspen III eHighlands meets all critical requirements for copper/low-k dielectric integration, ultra-low-k ashing and barrier layer removal, as well as FEOL applications.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.