MATTSON TECHNOLOGY WINS STRIP ORDERS FROM WORLD-LEADING CHIPMAKER FOR 90 NM FLASH PRODUCTION

Aspen III ICPHT's Processing Flexibility Enables Higher Yield at Lower Cost

FREMONT, Calif.- December 14, 2005 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it won a follow-on order for its Aspen III ICPHT from a leading flash memory manufacturer. The latest ICPHT recently shipped to one of the customer's U.S. fabs, adding to the base of ICPHT strip systems already installed at several of the chipmaker's other facilities. Additional ICPHT systems are scheduled to ship in early 2006 and will be used for bulk strip, HDIS and residue removal in the manufacture of 90 nm NOR flash memory and chipset devices .

Flash memory is a type of device that can retain data even when the power is turned off. The data can be electronically erased and reprogrammed. Because of its reliability, fast-read operations and random-access capabilities, NOR flash memory is used for embedded computing devices such as PDAs and cell phones.

“Our customer, one of the industry's leading flash memory producers, again selected the Aspen III ICPHT as a result of the exceptional processing performance and productivity it has consistently provided to help this chipmaker realize higher device yield and reduce costs,” said Stephen T. Lanza, Global Business Operations vice president & general manager, Europe and North America. “Strong customer service and attention to detail are also key reasons that this chipmaker selected Mattson, and we look forward to continuing to supply our customer's global facilities with our high-productivity, low cost-of-ownership strip solutions to support its 300 mm transition and 90 nm flash production ramp.”

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.