| MATTSON TECHOLOGY
WINS ORDERS FOR SUPREMA™ AND HELIOS FROM LEADING KOREAN CHIPMAKER FOR DRAM AND FLASH FABS
300 mm Strip and RTP Systems Used for Production of Sub-90 nm Memory Devices
FREMONT, Calif.-
February 28, 2006 -
Mattson Technology, Inc.
(NASDAQ: MTSN), a leading supplier of advanced process
equipment used to manufacture semiconductors, today announced that it has won orders for its Helios RTP system and the recently introduced Suprema strip system from a leading Korean memory manufacturer. This customer plans to use the Helios for spike anneal applications and Suprema for both bulk and high-dose implant stripping applications to produce advanced sub-90 nm DDR2 and NAND flash devices. System shipments have already begun, expanding the chipmaker's installed base of Mattson equipment.
“Our customer, one of the world's largest memory chipmakers, chose Mattson based on the efficiency, process flexibility and cost-of-ownership advantages of our strip and RTP systems, as well as the excellent support that we have provided over the last decade,” said J.W. Kim, Mattson Technology's Korea country manager. “These orders establish our 300 mm strip and RTP systems as tools of record at this chipmaker's fabs, and we look forward to continuing to provide the toolsets our long-standing customer needs for its most advanced production lines and devices.”
Suprema combines Mattson's proprietary inductively coupled plasma (ICP) technology with an innovative handling architecture design to provide the greatest productivity per square meter of fab space, the lowest cost-of-ownership, the industry's highest throughput for bulk strip applications, as well as the maximum process performance for high-dose implant strip (HDIS), descum and resist recess processes.
The Helios addresses the most demanding RTP applications, including nickel silicide formation and ultra-shallow junction spike anneals, enabled by advanced model-based temperature control for high productivity, excellent processing performance and superior cost-of-ownership.
About
Mattson Technology, Inc.
Mattson Technology, Inc. is
the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.
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