MAJOR TAIWANESE DRAM CHIPMAKER PLACES FOLLOW-ON ORDERS FOR MATTSON TECHNOLOGY ASPEN III ICPHT STRIP SYSTEM FOR NEXT PHASE OF 300 MM FAB EXPANSION

FREMONT, Calif. - March 28, 2006 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major Taiwanese DRAM chipmaker has placed follow-on orders for Mattson's Aspen III ICPHT strip system for the next expansion phase of its 90 nm, 300 mm fab. The strip systems will begin shipment in the second quarter of 2006 and will join Mattson's Helios RTP systems, which are already in production for the development of advanced transistor structures.

“The Aspen III ICPHT continues to be this DRAM manufacturer's tool of record for photoresist strip based on the system's proven productivity, reliability and process flexibility,” said Ming C. Kao, Mattson Technology's Taiwan country manager. “Our dependable customer support infrastructure in Taiwan was another key factor in the chipmaker's decision to again select Mattson, and we look forward to continuing to supply the tools and technologies our customer needs to ramp 300 mm production of its advanced memory devices.”

About the Aspen III ICPHT

Built upon the production-proven Aspen III platform, Mattson Technology's Aspen III ICPHT utilizes an enhanced RF plasma source with Mattson's proprietary inductively coupled plasma (ICP) technology to provide a wider process window for front-end-of-line (FEOL) and back-end-of-line (BEOL) strip applications. Featuring high-speed, dual-wafer handling and a modular design, the system provides the excellent process performance, high reliability, increased throughput and low cost of ownership (CoO) required for cost-effective chip manufacturing.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.