MATTSON TECHNOLOGY STRENGTHENS LEADERSHIP IN WAFER MANUFACTURING MARKET WITH LATEST CUSTOMER WINS

FREMONT, Calif. - May 16, 2006 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced multiple RTP system orders from several major wafer manufacturers in Japan and Korea, where the systems will be used for bulk silicon wafer production. The company also recently shipped and installed its RTP systems at wafer manufacturers in Europe, Malaysia and Taiwan. These latest customer wins reinforce the company's dominance in the wafer manufacturing market, where the company currently supplies RTP equipment to the leading wafer manufacturers.

“Wafer manufacturers demand RTP equipment that can provide the reliability, cost of ownership and technological capabilities to meet their production needs,” said Stephen T. Lanza, vice president and general manager of Mattson Technology's Global Business Operations. “The top wafer manufacturers in the industry continue to select Mattson based on the excellent uniformity and temperature control our RTP systems deliver to address their increasingly stringent processing requirements. These latest orders build on our solid track record and extend our leadership position in the wafer manufacturing segment.”

Demand for silicon wafers is forecasted to grow 14 percent in 2006, with total consumption expected to be 7,784 millions of square inches (MSI), according to Gartner Dataquest, a market research firm.

About Mattson RTP Systems

Mattson's RTP systems feature dual-sided, lamp-based heating technology that provides enhanced control, process uniformity and repeatability for both 200 and 300 mm production, providing chipmakers excellent processing performance, high productivity and superior cost-of-ownership. Mattson's RTP product line includes the 2900, a robust workhorse for 200 mm applications, the 3000 series for 200 and 300 mm fabrication and the Helios RTP system for advanced 300 mm applications, including nickel silicide formation and ultra-shallow junction spike anneals.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.