MATTSON TECHNOLOGY STRIP SYSTEM SUPPORTS WORLD-LEADING CHIPMAKER'S 90 NM FLASH AND CHIPSET PRODUCTION EXPANSION

Aspen III ICPHT Again Chosen for Processing Flexibility and Productivity

FREMONT, Calif. - June 6, 2006 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced multiple Aspen III ICPHT strip system shipments to support a leading flash memory and chipset manufacturer's capacity expansion requirements for its U.S. and European fabs. Additional ICPHT systems are scheduled to ship through the fourth quarter of 2006 and will be used for bulk strip, HDIS and residue removal in the manufacture of 90 nm NOR flash memory and chipset devices.

“The Aspen III ICPHT continues to be selected by one of the largest chipmakers in the world for its technological and cost-of-ownership advantages,” said Stephen T. Lanza, Global Business Operations vice president and general manager for Mattson Technology. “Our dedicated customer service also contributed to this chipmaker's decision to choose Mattson, and we are excited to provide continued support and high-productivity, high-performance strip tools to meet its 90 nm flash capacity expansion.”

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-591. Internet: www.mattson.com.