MATTSON TECHNOLOGY EXTENDS STRIP MARKET LEADERSHIP AT MAJOR ASIAN FOUNDRIES

FREMONT, Calif. - June 21, 2006 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that five major foundries located in China, Korea, Singapore and Taiwan have placed multi-system strip orders to support their advanced device development and manufacturing needs. The systems ordered include: Aspen II and III Strip, Aspen III ICPHT and Aspen III Highlands. System shipments and installations have already begun and are scheduled through the fourth quarter of this year.

“Mattson's sustained strip leadership in the foundry market is proof that our systems continue to deliver the processing and productivity performance our customers value for both front-end-of-line and back-end-of-line applications,” said Stephen T. Lanza, Global Business Operations vice president and general manager for Mattson Technology. “These latest orders are evidence that the semiconductor industry's leading foundries turn to Mattson as a partner they trust for dedicated customer service and enabling technologies to meet their volume production needs.”

According to Gartner Dataquest, the outlook is for relatively strong growth in the foundry market, reflecting the expectation that foundries will outperform the broader semiconductor market. Annual foundry market revenue is forecasted to rise to 18.3 percent during 2006 and 23.1 percent in 2007.

About Mattson Technology Strip Systems

The Aspen strip systems feature Mattson's proprietary inductively coupled plasma (ICP) source technology and are designed to meet the rigors of high-volume manufacturing in the sub-100 nm device era. The Aspen II and III Strip systems achieve excellent results for high-dose implant strip, photoresist and residue removal and surface cleaning for advanced applications. The Aspen III ICPHT provides increased throughput, improved process performance and reliability for front-end-of-line (FEOL) and back-end-of-line (BEOL) strip applications. The Aspen III Highlands is an advanced strip system used for removing resist, residue and barrier layer for low-k/copper applications.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-591. Internet: www.mattson.com.