MATTSON TECHNOLOGY WINS LARGE ORDER FROM TOSHIBA CORPORATION FOR NEW SUPREMA™ STRIP TOOL

Suprema Selected for Advanced NAND Flash Production

FREMONT, Calif. - July 11, 2006 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has won a large order from Toshiba Corporation for its recently introduced Suprema strip system. Toshiba plans to use the Suprema for both bulk and high-dose implant stripping applications to produce advanced sub-90 nanometer NAND flash devices. System shipments have already begun, expanding the chipmaker’s installed base of Mattson equipment.

"The NAND flash memory market is seeing rapid growth, to which Toshiba has responded by expanding production capacity," said Stephen T. Lanza, Global Business Operations vice president and general manager, for Mattson Technology. "Mattson’s Suprema system delivers the on-wafer results, superior productivity and cost-of-ownership (COO) this customer requires to maintain their leadership and respond to demand for higher-density NAND flash."

“We are honored by Toshiba’s selection, which validates Suprema’s technical advantages and excellent COO and reinforces Mattson’s market leadership in the NAND flash market,” said Mike Y. Morita, President of Mattson Technology Japan K.K. “The latest order expands Toshiba’s installed base of Mattson strip tools and demonstrates the rapid adoption of our new high-throughput strip system.”

About Suprema

Suprema combines Mattson's proprietary inductively coupled plasma (ICP) technology with an innovative handling architecture designed to provide the greatest productivity per square meter of fab space, the lowest cost-of-ownership, the industry's highest throughput for bulk strip applications, as well as the maximum process performance for high-dose implant strip (HDIS), descum and resist recess processes.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.