|
MATTSON TECHNOLOGY
STRENGTHENS DRAM LEADERSHIP WITH LATEST STRIP AND RTP FOLLOW-ON ORDERS FROM MAJOR TAIWANESE MANUFACTURERS
300 mm Aspen III ICPHT Strip and Helios RTP Systems Selected for Production of Advanced Devices Through 70 nm Node
FREMONT, Calif. -
August 8, 2006 -
Mattson Technology, Inc. (NASDAQ: MTSN),
a leading supplier of advanced process equipment used to
manufacture semiconductors, today announced
follow-on orders for its Aspen III ICPHT strip and Helios rapid thermal processing (RTP) systems from two major Taiwanese memory manufacturers. The tools will be used in these chipmakers' latest 300 millimeter (mm) fabs for the production of their advanced dynamic random access memory (DRAM) devices through the 70 nanometer (nm) technology node. The systems, which will expand Mattson's large installed base in the region, began shipping in June of this year and will be completed by the first quarter of 2007.
“Taiwan's leading DRAM manufacturers continue to utilize our Aspen III ICPHT strip and Helios RTP systems for the process of record at their state-of-the-art 300 mm fabs,” said Ming C. Kao, Mattson Technology's Taiwan country manager. “The chipmakers' selection was based on the high-quality process performance, superior productivity and overall cost-of-ownership advantages our tools provide for their memory production at the 90 nanometer node and below. These latest repeat orders further reinforce our leading strip and RTP positions in the Taiwan memory manufacturing sector. ”
Featuring Mattson's proprietary inductively coupled plasma (ICP) source technology, the Aspen III ICPHT provides increased throughput, improved process performance and reliability for front-end-of-line and back-end-of-line strip applications.
The Helios addresses the most demanding RTP applications, including nickel silicide formation and ultra-shallow junction spike anneals, enabled by advanced model-based temperature control for high productivity, excellent processing performance and superior COO.
About
Mattson Technology, Inc.
Mattson Technology, Inc. is
the leading supplier of dry strip equipment and the second largest supplier
of rapid thermal processing equipment in the global semiconductor
industry. The company's strip and RTP equipment utilize innovative
technology to deliver advanced processing performance and
productivity gains to semiconductor manufacturers worldwide
for the fabrication of current- and next-generation devices.
For more information, please contact Mattson Technology,
Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone:
(800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.
|
