|
MATTSON TECHNOLOGY
RECEIVES ORDERS FOR FIRST SUPREMA STRIP SYSTEMS IN CHINA FROM LEADING FOUNDRY
Suprema Will be Used for 90 Nm NROM Flash and Sub-65 Nm Logic Development
FREMONT, Calif. -
December 6, 2006 -
Mattson Technology, Inc. (NASDAQ: MTSN),
a leading supplier of advanced process equipment used to
manufacture semiconductors, today announced that its Suprema™ strip system has been selected by a leading foundry in China for 90 nm NROM flash production and 65 and 45 nm logic development. The Suprema systems, which are scheduled to ship to the chipmaker's 300 mm fab in the second quarter of 2007, will be used for both front-end-of-line (FEOL) and back-end-of-line (BEOL) bulk and high-dose implant strip (HDIS) applications. The Supremas will join a suite of other Mattson strip systems, including the Aspen III ICPHT and eHighlands, which are already in production at this chipmaker's fabs. These systems are the first Supremas ordered by a foundry and are the initial units into China.
“As our customer continues to ramp production at the 90 nm node and beyond, it requires strip capability that can be extended through several device generations,” said Wei Chow, Mattson Technology's China country manager. “After a competitive evaluation, this leading semiconductor foundry selected our Suprema as a result of its lower cost-of-ownership, advanced processing performance and faster time-to-yield. Suprema is designed to provide the advanced technology and process performance the foundry needs to manufacturer multiple generations of chips, meeting its high-volume 90 nm memory production and 65 nm and below logic development requirements. This order reflects our customer's continued confidence in the technology capabilities of our strip systems and reinforces our foundry and 300 mm strip leadership.”
About Suprema
Suprema combines Mattson's proprietary inductively coupled plasma (ICP) technology with an innovative handling architecture designed to provide the greatest productivity per square meter of fab space, the lowest cost-of-ownership, the industry's highest throughput for bulk strip applications, as well as maximum process performance for HDIS, descum and resist recess processes.
About
Mattson Technology, Inc.
Mattson Technology, Inc. is
the leading supplier of dry strip equipment and the second largest supplier
of rapid thermal processing equipment in the global semiconductor
industry. The company's strip and RTP equipment utilize innovative
technology to deliver advanced processing performance and
productivity gains to semiconductor manufacturers worldwide
for the fabrication of current- and next-generation devices.
For more information, please contact Mattson Technology,
Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone:
(800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.
|
