MAJOR TAIWANESE MEMORY MANUFACTURER SELECTS MATTSON TECHNOLOGY'S SUITE OF FLAGSHIP STRIP AND RTP PRODUCTS TO PRODUCE ADVANCED DRAM CHIPS

FREMONT, Calif.- March 12, 2007 - Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major Taiwanese memory manufacturer ordered a suite of Mattson's flagship strip and RTP produc s, including the Suprema™ strip system and the Atmos™ and Helios™ rapid thermal processing (RTP) tools. Shipments begin in the second quarter and extend through the fourth quarter of 2007. The systems will be used in the chipmaker's new 300 millimeter (mm) fab for the production of its advanced 512 Mb DDR2 SDRAM (double data rate two synchronous dynamic random access memory) devices. These orders are the latest in the series of wins from major Taiwanese memory manufacturers, expanding Mattson's large installed base in the region and further reinforcing our leadership in the DRAM market.

DDR2 SDRAM is a technology that is becoming the mainstream standard for personal computer memory. Its improved design allows for increased system performance, including: faster speed, more bandwidth (which means more—nearly double the amount—data can be passed through the RAM chip at one time), increased memory efficiency and reduced power consumption.

“This major Taiwanese DRAM chipmaker selected our strip and RTP systems based on their advanced processing capabilities, technology extendibility, high productivity and superior cost-of-ownership,” said Arthur Hall, Asian regional vice president of Mattson Technology's Global Business Operations.“ These orders—among the largest in the company's history—represent the third account win for our new Atmos thermal oxidation tool since its introduction in late 2006 and mark the point where all our customers have transitioned to our high-performance Suprema strip system. We look forward to supporting our long-standing customer as it quickly ramps production at its latest fabs.”

Suprema combines Mattson's proprietary inductively coupled plasma (ICP) technology with an innovative handling architecture designed to provide the greatest productivity per square meter of fab space, the lowest cost-of-ownership, the industry's highest throughput for bulk strip applications, as well as maximum process performance for HDIS, descum and resist recess processes.

Built upon the production-proven Helios platform, Atmos, Mattson's new dual-chamber, single-wafer 300 mm RTP system, enables a broad range of rapid thermal oxidation applications, including selective oxidation and shallow-trench isolation, for high-volume chip manufacturing through the 32 nm technology node.

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company's strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.