| MATTSON TECHNOLOGY RECEIVES REPEAT ORDERS FOR RTP TOOLS
Hitachi-Nippon Steel Joint Venture selects novel heating technology
FREMONT, Calif. — March 15, 1999 — Mattson Technology,
Inc. (Nasdaq: MTSN) a leading supplier of advanced process
equipment used to manufacture semiconductors, today announced
that Hitachi Nippon Steel Semiconductor Singapore Pte. Ltd.
(HNS), a joint venture between Hitachi, Nippon Steel and
the Government of Singapore, has placed a follow on order
for multiple Aspen RTP (rapid thermal processing) systems
for use at its Singapore fabrication facility. HNS plans
to use the systems in advanced processing on 200mm semiconductor
wafers.
"Rapid thermal processing is a major growth opportunity
for Mattson Technology, particularly in Asia, where some
of our customers are developing key processes for next-generation
enabling rapid thermal technology," said Ralph Martin,
president of Mattson Technology’s HTP product group. "We
are planning to use the same strategy we used in the introduction
of our strip equipment, which has since become one of the
leading strip products in the global marketplace."
In a bold move to gain market share and competitive advantage
in the computer memory market, HNS will use the RTP systems
for cost efficient manufacturing of 0.25 micron design rules
on 64 Megabyte DRAM devices.
Atsuyoshi Koike, general manager of Semiconductor Manufacturing
Technology Division at Hitachi’s Semiconductor & Integrated
Circuits Group, stated, "We chose the Aspen RTP system
because it has great potential for next-generation semiconductor
manufacturing. We believe this tool could help shorten cycle
times, boost our productivity and lower costs in this competitive
market."
ABOUT RTP PROCESSING
As microdevice features continue to shrink, optimized thermal
budget management (wafer processing time at temperature)
and improved temperature uniformity (temperature within the
wafer and wafer-to-wafer) is required during fabrication.
At the same time, cycle times (the length of time the wafer
is held at processing temperature) have a direct influence
in the process flow of the fab’s production.
Silicon wafers are heated to between 500 and 1200 degrees
Celsius during semiconductor manufacturing to anneal implants,
deposit conducting and dielectric films and to improve their
properties. Processing multiple wafers simultaneously in
a conventional furnace has the advantage of high wafer throughput
and good temperature uniformity, but requires long processing
times and very slow heating of the wafer stack to avoid excessive
thermal stresses. Treating one wafer at a time in typical
RTP systems reduces processing times, but requires high-intensity
lamps for rapid wafer heating. These lamp systems have not
been able to produce the desired temperature uniformity economically
and across the full range of temperatures, despite ongoing
development of increasingly complex optical pyrometry sensing
and control systems.
ABOUT ASPEN RTP
Mattson’s Aspen RTP system offers the best features
of traditional batch and single-wafer processors by combining
the temperature uniformity and simple resistance heating
of the batch furnace with the speed of a single-wafer processor
(while processing two wafers at a time). The susceptor based
system is designed for classical RTP applications (Titanium
silicide), and enabling technologies (Cobalt silicide, Hi-k
dielectrics, shallow junction formation), as well as traditional
furnace applications (SOG curing, BPSG reflow and implant
anneal).
About Mattson Technology
Mattson Technology Inc., is a leading supplier of thermal,
plasma and wet semiconductor processing equipment. The company's
products combine advanced process technology on a high productivity
platform, backed by industry-leading support. Since beginning
operations in 1989, the company's core vision has been to
help bring technology leadership and productivity gains to
semiconductor manufacturers worldwide. Headquartered in Fremont,
Calif., the company maintains sales and support centers throughout
the United States, Europe, Asia/Pacific and Japan. For more
information, please contact Mattson Technology Inc., 2800
Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON.
Fax: (510) 657-0165. Internet:www.mattson.com
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