Rapid thermal processing has
become critical in leading-edge device manufacturing. Mattson
Technology
is a leader in RTP market share, and we are industry-recognized
as a provider of the most advanced RTP technology. Leading
device manufacturers are employing our RTP equipment in high-volume
production of 90 nm technology devices, boosting the limits
of lamp-based rapid thermal processing.
Our proprietary dual-side
wafer heating, contact-less edge-guard ring and unique emissivity-compensated
temperature controller
guarantee superior results on the wafer with unparalleled
repeatability and temperature uniformity across the wafer.
Mattson’s RTP systems offer the lowest total cost of
ownership (TCO) by providing our customers processes with
improved wafer uniformity, reduced pattern shift and reduced
thermal stress.
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