SPARES |
3000
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Part Number
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Description |
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| 1002002 |
Filter, Air, K&N single Filter |
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| 1003856 |
Vessel, quartz, steam gen for SIC lance) |
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| 1004371 |
Si - Ring segment 8" carrier AST3000 |
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| 1004372 |
Si ring segment 12" carrier |
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| 1005904 |
sealing muffler |
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| 1005905 |
Muffler, inlay, complete |
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| 3000397 |
Endeffector, 8/12" Q M02 R30EdgeGrip |
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| 3000403 |
Endeffector 8" Thin Wafer Vers. 2 |
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| 3001747 |
Endeffector 8"-12" Q M02 R30 suction |
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| 11100007 |
Lamp 24V/6.5W |
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| 11100072 |
Lamp IR-, 3000W 380V ripple sm. Ceramics |
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| 11100087 |
Lamp IR-, 3000W 380V Ripple short wire |
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| 11100122 |
Lamp bulb 24V/7W DL1-BEB |
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| 11200054 |
Hoses, Insulating, GSK-900°C |
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| 11400011 |
O-Ring 4.42 x2.62 Vi500 |
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| 11400013 |
O-Ring, 12,00 x 2,00, Chemraz white |
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| 11400018 |
O-Ring 5x2 Vi 500 FPM80 |
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| 11400042 |
Special ground joint sleeve teflon |
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| 11900010 |
Heater Cartridge-, 240V Watlow C1E-5240 |
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| 14000060 |
Sensor, NH3-, 9602-6702 |
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| 17000593 |
AEROBAR NILSTAT 5285-28 UC |
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| 17000737 |
Sensor, NH3, 9602-6700 for FMK 9602 |
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| 17000818 |
FTT 9602 Satellite 7 H2-Sensor |
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| 17000862 |
Sensor, H2, FMK FTT/R metering range 0-1 |
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| 17600018 |
Batterie Pack for UPS R30/0200MH-MD1 |
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| 19201733 |
Heating tape vent 6 3000 Steam |
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| 27300004 |
O-Ring 23,52x1,78 Vi563 |
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| 27300016 |
O-Ring 2,00x1,5 Viton |
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| 27300036 |
O-Ring 5,5x1,5 Vi500 |
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| 27300051 |
O-Ring 189.87x5.33 Vi500 |
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| 27300052 |
O-Ring 9x2 Vi500 |
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| 27300061 |
O-Ring 4x2,5 EPDM |
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| 27300071 |
O-Ring 5,8x1,5 Vi563 |
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27300076
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O-Ring B+S-OR2000700-V80G1 |
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| 27300113 |
O-Ring 84x2 Vi500 |
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| 27300131 |
O-Ring 291,47x5,30 CEMRAZ SD550 75°Shore |
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| 27300132 |
O-Ring 189,87x5,3 CEMRAZ SD550 75° Shore |
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| 27300136 |
O-Ring 5,80x1,50 Chemraz SD550 75° Shore |
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| 27300137 |
O-Ring 9,00x2,00 Chemraz SD550 75° Shore |
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| 27300138 |
O-Ring 17,00x2x00 Chemraz SD550 75°Shore |
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| 27300139 |
O-Ring 4,42x2,62 Chemraz SD550 75° Shore |
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| 27300141 |
O-Ring, 3/ 4" x 1/16" bis 250°C Kalrez |
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| 27300142 |
O-Ring ,13/16" x 1/16" bis 250°C Kalrez |
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| 27300146 |
O-Ring, K#126, weiss, Kalrez AS-568A |
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| 27500011 |
Filter Substitute Cartridge, for 2Bx2 |
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| 27500017 |
Filter Schwebstoff-, 915x610 |
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| 37300033 |
Sealing Element, PTFE SS Garter Spring |
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| 37300034 |
O-Ring 291.47x5.33 Viton |
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| 37300039 |
O-Ring 26,7x1,78 Viton |
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| 37300042 |
Diaphragm, Faltenbalg PTFE-virginal |
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| 37300044 |
Sealing CEFIL-AIR-, |
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| 37300045 |
Foil PTFE AST 3000 |
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| 37300053 |
Seal Ring, with Filter Inlet |
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| 37500003 |
Filter Micro-Inline-Gas-, Wafergard II F |
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| 42100044 |
Sealing, high grade steel-, AST3000 |
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| 47800116 |
Si - Ring segment 8" Träger AST3000 |
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47800117
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Si ring segment 12" carrier AST3000 |
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47800153
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Si-Ringsegment 8 mit Flat |
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| 49502397 |
PEEK Water Plate for Centerpiece |
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| 57200006 |
Quarz-Platte Liner, seitlich Rotation |
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| 57200011 |
Quartz-panel top |
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| 57200012 |
Quartz Plate Rotation AST3000 |
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| 57200021 |
Quarz-Platte Liner, vorne AST3000 |
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| 57200024 |
Quarz-Platte unten statisch Rippler |
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| 57200031 |
Gas Reflection Plate Rotation/Pyrogenic |
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| 57400012 |
Door Aperture 8" with Segmentlift |
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| 57600014 |
plate gasdistribution-, rotation back |
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| 57600015 |
Platte Gasverteiler-, hinten AST3000 |
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| 57600017 |
Platte Gasverteiler-, vorn AST3000 |
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| 57600022 |
Plate gas distribution front+fix nozzles |
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| 58000021 |
Orifice rotation accelerate AST 3000 |
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| 8000022 |
orifice rotation brake AST 3000 |
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| 58000029 |
Quarz-Rundstab Ø=4 mm 1000mm lang |
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| 58000030 |
Quarz-Opaque rund D=6 mm, L=1000 mm |
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| 58000037 |
Quarz-Rohr AD 8 ID 1 Länge=296mm |
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| 58000038 |
Quarz-Rohr AD 9 ID 1 Länge 296mm |
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| 58500004 |
Pin Ø=1.4+0.1 25mm lg. |
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| 58500012 |
Pin Ø=2,9, 13mm lg. Cooling Station neu |
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| 58500018 |
pin bearing-, tray AST3000 |
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| 58500023 |
segment pin AST3000 |
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| 58500024 |
axle, rotation, ring overturning 3000 |
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| 58500025 |
pin safety-, ring-tilt AST3000 |
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| 58500029 |
bearing ring-tilt entablature AST3000 |
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| 58500030 |
bearing ring-tilt bottom AST3000 |
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| 58500034 |
Halter Abstands-, Liner oben/statisch |
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| 58500039 |
Pin Ø=2.9 13 mm lg. Kühlstation feuer |
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| 58500040 |
Lager statisch Unterteil 3mm-Schaukel |
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| 58500045 |
Pin Ø=1,6, 17mm, standard Tip |
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| 58500057 |
Holder Distance-, coverplate top 300X |
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| 58600046 |
Ring 12" Rotation 3mm 3000 |
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| 58600049 |
support fan cover AST3000 |
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| 58600050 |
ball sapphire-, d=2,00mm colorless |
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| 58600051 |
Ring 8" Rotation 3mm flat 3000 |
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| 58600052 |
stick Opak-, sealing gas intake |
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| 58600053 |
Quartz rocker lever bearing frame |
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| 58600054 |
bell crank-, ring-tilt AST3000 |
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| 58600055 |
shield, ceramic fan-, 3000 |
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| 58600062 |
bearing cage rotation |
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| 58600063 |
Podest Umlenk-, statisch |
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| 58600081 |
Quartz-panel Liner, top RTP |
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| 58600092 |
Rotor inner part 12" 2/3 r |
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| 58600093 |
Rotation Disk 8" 3000 Version 2 |
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| 58700019 |
Rohr O2-Sensor AST3000 |
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| 58700024 |
Burner lance H2 |
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| 58700029 |
PAG Tube Quarz Stm D/B 345mm |
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| 58900115 |
Air bearing 9mm 3000 |
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| 58900116 |
Tray 8" rotation ring tilt mechanism |
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| 58900118 |
Schaukel 8" Rotation AST3000 |
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| 58900119 |
tray 12" rotation ring-tilt AST3000 |
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| 58900121 |
Tilt mechanism 12" rotation 3000 |
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| 58900126 |
Träger 12 statisch / Wafer zentrisch |
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| 58900128 |
Träger 8" statisch Dicke=3mm |
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| 58900140 |
Schaukel 8 statisch Dicke=3mm |
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| 58900141 |
Schaukel 12 statisch Dicke=3mm |
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| 58900154 |
Gestell Lager-, 9mm mit Zapfen |
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