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Spares
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SPARES |
AspenIII
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Part Number
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Description |
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1000658
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GAUGE, GAP,WIDE, .100 |
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| 1001384 |
O-RING,112V75,VITON |
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| 1001388 |
VAT HIGH PERFORMANCE VACUUM GREASE |
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| 1001415 |
O-RING,159V75,VITON |
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| 1001430 |
PADDLE,END EFFECTOR,VAC RBT |
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| 1000658 |
GAUGE,GAP,WIDE, .100 |
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| 1001384 |
O-RING,112V75,VITON |
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| 1001388 |
VAT HIGH PERFORMANCE VACUUM GREASE |
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| 1001415 |
O-RING,159V75,VITON |
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| 1001430 |
PADDLE,END EFFECTOR,VAC RBT |
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| 1003169 |
PIN,ALIGNMENT,2WAY SLIT DOOR |
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| 1003385 |
O-RING,PAROFLUOR,2.850X.210,V1266 |
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| 3005158 |
KIT,LUBRICRANT GEAR HEAD,A3 |
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| 165-90000-00 |
PCB ASY,DIGITAL I/O |
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| 258-07811-00 |
COUPLING,BELLOWS |
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| 258-21863-00 |
WLDMNT,COIL,SILVER PLATE,ICPht |
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| 263-06185-00 |
COIL ASY,SILVER PLATED |
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| 301-05710-00 |
GAUGE,WAFER POSITIONING,300MM |
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| 301-05803-00 |
GAUGE,ALIGNMENT,SLIT DOOR,A3 |
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| 303-05668-00 |
PLATE,LIFT,ROBOT,A3 |
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| 303-07300-00 |
GRID,UPR,W/BLK HLS,300MM STP |
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| 303-07379-00 |
PIN,WFR RTNG,MULTI-RANGE HTR |
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| 303-07406-00 |
NUT,HT/CL BLK,STRIP |
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| 303-07608-00 |
GRID,LWR,W/BLK HOLES,MOD,300MM |
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| 303-07621-00 |
SCREW,LEVELING,SHORT |
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| 303-12425-00 |
PIN,LIFT,FIXED,A3 STRIP |
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| 303-12427-01 |
PLATE,RIGHT,FXD LIFT PIN,1.995 |
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| 303-12428-01 |
PLATE,LEFT,FXD LIFT PIN,1.995 |
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| 303-19833-00 |
BLOCK HEAT/COOL A3 STR |
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| 304-01036-00 |
TUBE,QUARTZ,200.5MMODX3.5MM,W |
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| 304-08775-00 |
SEAL,BACKUP,ROBOT,2.5",A3 |
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| 304-08776-00 |
SEAL,BACKUP,ROBOT,6" #1,A3 |
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| 304-08777-00 |
SEAL,BACKUP,ROBOT,6" #2,A3 |
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| 305-07486-00 |
PLUG,SPRING,A3 |
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| 429-08671-00 |
GAUGE,20T,KF-16FL,TYL CAP DIA |
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| 430-05051-00 |
TIMING BELT,463GRV,3/8W,.080PT |
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| 430-05052-00 |
TIMING BELT,216GRV,3/8W,.080PT |
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| 430-05485-00 |
BELT,TMG,565MMPL,113T,25MMW |
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| 430-05486-00 |
BELT,TMG,375MMPL,125T,15MMW |
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| 430-05487-00 |
BELT,TMG,537MMPL,179T, 15MMW |
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| 430-05615-00 |
TIMING BELT,105GRV,1/5 P,3/8WD |
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| 430-05619-00 |
TIMING BELT,72GRV,1/5P,3/8" |
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| 430-05620-00 |
TIMING BELT,125GRV,.080P,1/4" |
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| 430-07197-00 |
TIMING BELT,1/5PT,1/2BLT,80'ST |
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| 456-00226-07 |
O-RING,1.234 ID X .139CS,VITON |
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| 456-00226-64 |
O-RING,.921ID X .139 CS,VITON |
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| 456-00226-66 |
O-RING,.671ID X .139 CS,VITON |
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| 456-00226-80 |
O-RING,0.426 ID X .070CS,VITON |
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| 456-00226-83 |
O-RING,1.97 ID X .210CS,VITON |
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| 456-00226-90 |
O-RING,5.987ID x .103CS,VITON |
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| 456-00722-07 |
O-RING,.468 ID X .078 W,KALREZ |
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| 456-01027-10 |
O-RING,4.475 ID X .210W,FLORO |
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| 456-01027-21 |
O-RING,18.955 ID X .210W,FLORO |
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| 456-01027-26 |
O-RING,1.859 ID X .139W,FLORO |
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| 456-01027-28 |
O-RING,6.725 ID X .210W,FLORO |
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| 456-01027-29 |
O-RING,.600 ID X .210W,FLORO |
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| 456-01027-30 |
O-RING,3.484 ID X .139W,FLORO |
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| 456-01027-31 |
O-RING,6.484 ID X .139W,FLORO |
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| 456-01027-33 |
O-RING,4.109IDX.139W,FLURO |
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| 456-05784-02 |
O-RING,27.80 ID X .210CS,FLORO |
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| 456-05884-00 |
O-RING,51.39X.210,75DUR,VTN |
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| 456-05887-00 |
O-RING,19.95X.210,50DUR,VTN |
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| 456-05888-00 |
O-RING,29.10X.210,75DUR,VTN |
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| 456-05891-00 |
O-RING,28.90X.210,75DUR,VTN |
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| 456-08133-00 |
GASKET,VCR,SIDE RETAINER,NI |
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| 456-09610-02 |
O-RING,7.725ID,.210CS,60DUR,FL |
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| 456-12299-00 |
O-RING,18.95X.210,60DUR,FLUORO |
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| 456-20260-00 |
O-RING,PADDLE,KALREZ 8575 |
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| 456-21603-00 |
O-RING,28.00"IDX.21W,FLOUROS |
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| 456-22632-00 |
O-RING,60 DURO,VITON |
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| 456-23323-00 |
Quartz Vessel DU171 O-RING SEAL |
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| 456-24416-00 |
O-RING,KLZ -155 8085ST,NW100 |
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| 475-09474-00 |
SCREW,BTNHD,6-32 X 5/8,SST |
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| 478-05234-00 |
SHAFT,GROUND,1/4DIAX6"LONG |
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| 482-08864-00 |
SPRING,CMPRSN,.42ODX.88FL |
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| 482-08865-00 |
SPRING,CMPRSN,.24ODX.88FL |
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| 482-09141-00 |
SPRING,EXTN,2.0L,.055 MS WIRE |
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| 491-05419-00 |
VALVE,THROTTLE,ISO 100,300MM |
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| 491-07397-00 |
VALVE,VAC GATE,W/ISO FLG,DN100 |
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| 501-23880-00 |
AMPL,PMC/PMAC,Q26/D16 NEW |
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| 504-18756-00 |
BATTERY,LITHIUM,3.6V,1.0AH |
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| 510-08660-00 |
CAP,VAC,100PF |
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| 510-18633-00 |
CAP,CVO5C,125H/8 |
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| 514-05626-00 |
CONT,TEMP/PROCS,HRZ MNT,GRN/R |
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| 514-20787-00 |
CONT,OVER TEMP LIMIT SWITCH |
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| 525-17541-00 |
FUSE,15A,32V,3AG,SLO BLO |
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| 529-16425-00 |
GEN,RF,RFG 3001 |
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| 544-00024-00 |
TB,QUARTZ |
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| 544-00026-00 |
COIL |
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| 544-05001-00 |
STRAP,GND |
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| 544-05002-00 |
CLAMP,COIL |
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| 544-05003-00 |
CLAMP,CAP |
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| 552-23881-00 |
PMC,208V,AMP FAULT DISABLED |
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| 553-22801-00 |
MATCHING NTWK,A3 STRIP (F47) |
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| 575-15541-00 |
MNMTR,10 TORR,KF 16,MYKROLIS |
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| 575-16710-00 |
MANOMTR,20TORR,KF16,MKS |
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| 912-16003-00 |
RING,RETAINING,3/16 DIA |
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| 914-13006-00 |
GASKET RETAINR ASY,VCR,SST |
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| 914-14003-00 |
VALVE,FLOW CONTROL |
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| 931-14001-00 |
SENSOR,OPTO,SLOT |
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