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Spares
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SPARES |
Suprema
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Part Number
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Description |
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| 1000418 |
Assy, Source Coil |
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| 1000503 |
Xsducer, Pressure, N2, 1000 Torr |
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| 1000526 |
O-Ring Adapter Plate To PM |
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| 1000527 |
O-Ring, Slit Door, PM |
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| 1000529 |
O-Ring, TM Lid |
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| 1000530 |
O-Ring, Adapter Plate to Xfer |
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| 1000531 |
O-Ring, PM Slit Door Lower Assy |
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| 1000669 |
O-Ring, LL Lid |
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| 1000670 |
O-Ring, TM Slit Door Lower Assy |
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| 1000920 |
O-Ring, PM Chamber Lid |
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| 1001016 |
Manometer, 10 TORR |
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| 1001305 |
Signal Rear Light Tower |
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| 1001354 |
RF Generator |
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| 1001388 |
O-Ring Seal Kit, VAT Valve |
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| 1001466 |
Faraday Shield |
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| 1001486 |
Timing Belt, Theta Motor |
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| 1001487 |
Timing Belt, Z-Motor |
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| 1001490 |
Quad Seal, Inner Shaft, Vac Robot |
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| 1001491 |
Quad Seal, Outer Shaft, Vac Robot |
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| 1001492 |
Quad Seal, Seal Linear |
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| 1001627 |
Quad Seal, Slit Door |
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| 1001628 |
Quad Seal, Slit Door |
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| 1001902 |
Capacitor |
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| 1001972 |
End Point Detector |
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| 1002662 |
Power Supply, 24VDC, 27Amp |
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| 1002663 |
Power Supply, 48VDC |
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| 1002664 |
Power Supply, 24VDC, 240W |
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| 1003025 |
Contactor, Main |
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| 1003027 |
Fuse, 2Amp Rejection |
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| 3000095 |
PIB |
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| 3000101 |
Process Module PM2 |
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| 3000189 |
Assy, MFC I/F |
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| 3000436 |
Ethernet Switch |
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| 3000833 |
Cbl Assy, RB-1 J11, Z Mot RS485, MX2 |
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| 3000834 |
Cbl Assy, RB-1 J21, Z Mot PWR, MX2 |
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| 3000835 |
Cbl Assy, RB-1 J31, Z Mot I/O, MX2 |
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| 3000836 |
Cbl Assy, RB-1 J41, Z Mot Home Sns, MX2 |
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| 3000837 |
Cbl Assy, RB-1 J13, A1 Mot RS485, MX2 |
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| 3000838 |
Cbl Assy, RB-1 J22, A1 Mot PWR, MX2 |
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| 3000839 |
Cbl Assy, RB-1 J32, A1 Mot I/O, MX2 |
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| 3000840 |
Cbl Assy, RB-1 J42, A1 Mot Home Sns, MX2 |
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| 3000842 |
Cbl Assy, RB-1 J23, A2 Mot PWR, MX2 |
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| 3000843 |
Cbl Assy, RB-1 J33, A2 Mot I/O, MX2 |
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| 3000844 |
Cbl Assy, RB-1 J43, A2 Mot Home Sns, MX2 |
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| 3000845 |
Cbl Assy, RB-1 J14, B1 Mot RS485, MX2 |
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| 3000846 |
Cbl Assy, RB-1 J24, B1 Mot PWR, MX2 |
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| 3000847 |
Cbl Assy, RB-1 J34, B1 Mot I/O, MX2 |
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| 3000848 |
Cbl Assy, RB-1 J44, B1 Mot Home Sns, MX2 |
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| 3000850 |
Cbl Assy, RB-1 J25, B2 Mot PWR, MX2 |
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| 3000851 |
Cbl Assy, RB-1 J35, B2 Mot I/O, MX2 |
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| 3000852 |
Cbl Assy, RB-1 J45, B2 Mot Home Sns, MX2 |
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| 3001311 |
Assy, Blade Slit Door, PM |
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| 3001443 |
EMO Board |
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| 3001469 |
Electrical Enclosure |
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| 3001571 |
Assy, Front Door |
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| 201-22322-00 |
Reservior, Grease, Axial Seal |
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| 255-22550-00 |
PCB, Assy, Pump/Chiller/Scrubber Int |
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| 255-23613-00 |
Analog Filter |
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| 263-09456-00 |
Kit, Computer CPU Card |
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| 263-21681-01 |
RF Coax Cable, Head AC |
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| 263-21681-02 |
RF Coax Cable, Head BD |
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| 302-21865-00 |
Coil Capacitor Tab, ICPht |
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| 303-07405-00 |
Insulator |
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| 304-21659-00 |
Anti-Skate Pin |
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| 405-20548-01 |
Kit, Computer CPU Card |
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| 456-00226-03 |
O-ring, Seal Linear |
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| 456-00226-26 |
O-Ring Slit Door, TM |
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| 456-00226-56 |
O-Ring, Front Door |
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| 456-00226-74 |
O-Ring, Slit Door Lower Assy, PM |
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| 456-00226-92 |
O-Ring, Plate, Lift Pin |
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| 456-01027-19 |
O-Ring View Port |
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| 456-15592-01 |
O-Ring, Slit Door Lower Assy, PM |
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| 456-23323-00 |
O-Ring Quartz Tube |
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| 456-24416-00 |
O-Ring, VAT Valve, NW100 |
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| 483-13911-00 |
TORR Switch |
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| 483-23052-00 |
Foreline Pressure Switch |
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| 491-23177-00 |
Vacuum Valve |
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| 493-16983-00 |
Valve,Swglk,Pneu, F/F,1/4 VCR, 5R |
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| 505-12577-00 |
Fan, RF Cage (consumables) |
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| 509-16446-00 |
Pyrex Window |
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| 513-21953-00 |
Sensor, Lift Pin |
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| 517-24229-00 |
KVM Unit |
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| 551-24255-00 |
Kit, Computer CPU Card |
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| 552-23537-00 |
Converter RS232 / RS485 |
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| 553-21311-00 |
Mtchd Ntwk, 208VAC |
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| 559-17198-00 |
Analog outputs, 16 Channel |
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| 559-22754-00 |
Digital I/O, 64 in / 64 out |
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| 559-24270-00 |
Analog outputs, 64 Channel |
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| 559-24271-00 |
RS232, 4Ports |
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| 566-03902-00 |
Time Delay Relay |
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| 566-20589-00 |
Assy, Relay Board, Rev-P |
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| 635-08804-00 |
Grease, Fomblin |
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| 913-10055-00 |
O-Ring, Lower Assy, Lift Pin |
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| 933-11004-00 |
IDEC Ice Cube Relay |
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| 934-13002-00 |
Power Supply, +/-15VDC |
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