Management Team

Allen Lu

President and Chief Executive Officer

Dr. Allen Lu is President and Chief Executive Officer of Mattson Technology. Dr. Lu joined Mattson Technology in June 2016 and in October 2016 was appointed as President and Chief Executive Officer.

Dr. Lu is an industry veteran with diverse experiences in technology, manufacturing, business and management. Prior to joining Mattson Technology, Dr. Lu was Vice President of SEMI and President of SEMI China, where he transformed SEMICON China into the largest global platform for connecting the semiconductor manufacturing supply chain. Prior to that, Dr. Lu served as the China Fab Program Manager for Intel’s (INTC) Technology Manufacturing and Engineering Group, Director of Intel China Public Affairs and in various management and technology roles in Intel’s California Technology and Manufacturing Group. Dr. Lu was a key member of Intel’s team driving expansion in China for manufacturing, R&D and business development. Prior to Intel, Dr. Lu was a technologist at Applied Materials (AMAT).

Dr. Lu has a Ph.D. in solid state physics from the University of Virginia, and a B.Sc. from the University of Science and Technology of China.

Subhash Deshmukh

Chief Business Officer, Worldwide Business

Dr. Subhash Deshmukh is Chief Business Officer at Mattson Technology, responsible for worldwide sales, marketing and service. Dr. Deshmukh joined Mattson Technology in June 2017.

Prior to joining Mattson Technology, Dr. Deshmukh was Chief Operating Officer at Poet Technologies (V:PTK) and a member of the Board of Directors at DenseLight Semiconductors, Pte. Ltd. (Singapore). Dr. Deshmukh has more than 25 years of industry experience, including serving as Vice President of Emerging Technologies and Products at Applied Materials (AMAT), Vice President and General Manager of the Plasma Products Business Unit and Vice President of Business Development at Varian Semiconductor Equipment Associates (VSEA), General Manager of Dielectric Etch Products Division at Applied Materials, and other key management roles at Lam Research (LRCX) and AMI Semiconductors (AMIS). Dr. Deshmukh has been granted over 27 patents and has authored and co-authored more than 55 technical articles.

Dr. Deshmukh has a Ph.D., as well as a M.S. in Chemical Engineering from Wayne State University.

Michael Yang

Chief Technology Officer, Thermal Product Group

Dr. Michael Yang is Chief Technology Officer of Mattson Technology with responsibility for Thermal product excellence. Dr. Yang joined Mattson Technology in July 2016.

Dr. Yang is an industry veteran, with more than 20 years in the semiconductor equipment and adjacent industries. Prior to joining Mattson Technology, Dr. Yang was Vice President of Business Development at Varian Semiconductor Equipment Associates (VSEA) with the responsibility of the company’s growth strategy. Prior to Varian, he spent more than ten years and held numerous technical and managerial positions at Applied Materials (AMAT), where he was instrumental in many successful new product development programs.

Dr. Yang received his B.Sc. degree from Nanjing University, China, his Ph.D. in Surface Chemistry from Columbia University, and also conducted research in Lawrence Berkeley National Laboratory. Dr. Yang has been granted approximately 50 U.S. patents and 100 international patents, and has co-authored over 30 scientific publications.

Frank Moreman

Chief Operating Officer, Worldwide Manufacturing

Mr. Frank Moreman is Chief Operating Officer of Mattson Technology with responsibility for worldwide manufacturing, quality, supply chain, information technology and facility operations. Mr. Moreman joined Mattson Technology in January 2018 with an extensive track record of building operational excellence in various manufacturing settings.

Prior to joining Mattson Technology, Mr. Moreman served as Chief Operating Officer at three companies in the robotic exoskeleton and prosthetics industries – suitX, LIM Innovations and Ekso Bionics (EKSO). Prior to that, Mr. Moreman served in various management roles within the semiconductor industry, including as Vice President, Industrial and Semiconductor Division of Sanmina – SCI (SANM), responsible for the management of manufacturing facilities in the U.S. and China, Vice President, Materials, Quality and Information Technology at Ultra Clean Technology (UCTT), and Chief Operating Officer of Sieger Engineering.

Mr. Moreman has a B.Sc. in Mechanical Engineering from the U.S. Naval Academy.

Mei (Maggie) Xie

Chief Financial Officer

Ms. Maggie Xie is Chief Financial Officer of Mattson Technology with responsibility over all financial functions, including accounting, internal audit, treasury, tax and corporate finance. Ms. Xie joined the Company in September 2020.

Ms. Xie has over 20 years of varied experience in financial management, capital markets and corporate strategy. Prior to joining the Company, Ms. Xie served as Co-President and earlier as CFO & Board Secretary of Baihe & Jiayuan Network Group. During her tenure at Baihe and Jiayuan Network Group, she was responsible for its initial public listing on the National Equities Exchange & Quotations in China, follow-on stock offerings and several high-profile mergers and acquisitions. Ms. Xie also served as CFO for two separate Siemens joint ventures in China. Ms. Xie started her career with Deloitte Touche Tohmatsu and KPMG in their audit practices.

Ms. Xie received her Bachelors and Masters in Accounting from Tsinghua University.

Qiang (Curtis) Liang

Vice President and General Manager, China Operations

Mr. Curtis Liang is Vice President and General Manager of China Operations, responsible for sales, customer support and the operational leadership for the China region.  Mr. Liang joined the Company in September 2019.

Mr. Liang has a proven track record that spans more than 20 years in the semiconductor equipment and chip industry.  Prior to joining the Company, Mr. Liang served in a variety of senior executive roles, including most recently as General Manager of the China Process Diagnostics and Control Group for Applied Materials (AMAT).  Mr. Liang has also served as General Manager and Vice President at Tokyo Electron Limited Shanghai (TES), China Strategy Marketing and Business Development at ASML (ASML), Deputy Fab Director at GSMC and other key management roles with Intel (INTC) and Texas Instruments (TXN).

Mr. Liang holds a M.S. in Materials Science and Engineering from the University of Science and Technology Beijing and a Ph.D. in Materials Engineering Science from Virginia Polytechnic Institute and State University. Mr. Liang has authored or co-authored over 15 scientific publications.

Leroy Luo

Vice President and General Manager, China Product Group

Mr. Leroy Luo is Vice President and General Manager of the China Product Group, responsible for managing the engineering and product development teams focused on the China market. Mr. Luo joined the Company in October 2020.

Mr. Luo brings significant managerial, engineering and supply chain experience to the Company, having spent more than 35 years working within the semiconductor equipment and solar industries, including 15 years concentrated on the China market. Prior to joining the Company, Mr. Luo was the co-founder and CEO of Alphatomic, a semiconductor equipment startup company in Shanghai, China. Before that, Mr. Luo held various management roles, including as President of Vitriflex, co-founder and Managing Director of NuvoSun, Managing Director of China Operations for Miasole, a founding member and Corporate Marketing and Product Management Chief of Advanced Micro-Fabrication Equipment (AMEC), and Vice President of Engineering for Scivac. Earlier in his career, Mr. Luo worked for Lam Research (LRCX) and Mattson Technology.

Mr. Luo holds a B.S. and a M.S. in Physics from Zhongshan University in China, and a M.S. in Electrical Engineering from the University of Texas.

Shannon Hart

Senior Vice President, Fremont Manufacturing Operations

Mr. Shannon Hart is Senior Vice President of Fremont Manufacturing Operations of Mattson Technology. Mr. Hart joined Mattson Technology in July 2014.

Prior to joining Mattson Technology, Mr. Hart held various roles over nearly 25 years in business development, customer service, supply chain, manufacturing and engineering at Lam Research (LRCX), Novellus Systems (NVLS) and Applied Materials (AMAT). Mr. Hart has been granted U.S. patents in metal joining and surface coatings.

Mr. Hart has a M.Sc. in Applied Physics from Texas State University, and a B.Sc. in Applied Physics and Mathematics from Angelo State University.

Matthew Wheeler

Vice President, Finance

Mr. Matthew Wheeler is Vice President, Finance of Mattson Technology, with responsibility over worldwide financial operations and corporate planning.  Mr. Wheeler joined Mattson Technology in April 2020.

Mr. Wheeler has over 20 years of financial management experience within the semiconductor industry. Prior to joining Mattson Technology, Mr. Wheeler spent more than 10 years at Lam Research, most recently as its Managing Director of Global Operations Finance with financial oversight over six worldwide factories. Prior to Lam Research, Mr. Wheeler held various finance management roles with increasing responsibility at Altera (ALTR), which subsequently was acquired by Intel.

Mr. Wheeler holds a B.S. in Business Administration from California Polytechnic State University, San Luis Obispo and a M.B.A. from the University of California, Berkeley.

Jon Myers

Vice President, Mattson Service Product Group

Mr. Jon Myers is Vice President of the Mattson Service Product Group (MSPG), responsible for global customer support services, including field service operations, after-sales support and spare parts fulfillment. Mr. Myers joined Mattson Technology in July 2017.

Mr. Myers has over 30 years of experience in the semiconductor equipment and materials industry, serving in a variety of senior executive roles. Prior to joining Mattson Technology, Mr. Myers served as Vice President, Sales and Marketing at both Vacuum Engineering & Materials and Silicon Valley Technology Center Technologies. Prior to that, Mr. Myers served as General Manager, Customer Support Business Group at Lam Research (LCRX), where he managed their global service organization, and also as General Manager, North America Regional Operations, responsible for the division’s sales, service, process and technology. Prior to Lam Research, Mr. Myers held various management roles at Teradyne (TER) and General Electric (GE).

Mr. Myers has a B.Sc. in Mechanical Engineering from Cornell University and a M.B.A. from Harvard University.