Surface Treatment and Ultra-Selective Materials Removal

Mattson Technology Atomic Surface Engineering™ technology address some of the most critical logic and memory manufacturing challenges. Continuous integrated circuit device scaling includes fabrications of small, deep and complex 3D structures composed of thin layers of different materials. Manufacturing requires ultra-high selectivity in materials removal processes, and a precise control of physical, chemical and electrical properties of thin film surfaces.

Novyka™ Product Family

Mattson Technology’s Novyka™ products leverage our Atomic Interface Engineering™ technology by providing unique chemistries in surface cleaning, surface treatment and surface modification. The Novyka™ products enable ultra-high selectivity in removal of thin and delicate layers in 3D devices structures. They also offer the best total cost of ownership in their class.